| Beamport |
r[Cu |
Beamline |
| BL-1 |
VUV |
Vacuum Ultraviolet Spectroscopy |
| BL-2 |
ξXόͺυ |
VLS-Grating Soft X-ray XAFS |
| BL-3 |
XAFS |
Double-Crystal focusing XAFS |
| BL-4 |
XAFS |
Double-Crysral XAFS |
| BL-5 |
LIGA II |
Exposure equipment for the LIGA process U |
| BL-6 |
LIGA I |
Exposure equipment for the LIGA process T |
| BL-7 |
2³υdqͺυ |
2-dimensional Photoelectron
spectroscopy |
| BL-8 |
SORISiυdqͺυ/CIUͺυj |
Photoelectron spectroscopy combined with ion scattering spectroscopy |
| BL-10 |
ξXόXAFS |
Double-Crystal Soft X-ray XAFS focusing |
| BL-11 |
ξXό½Λ¦v
iϊ{΄qΝ€J@\j |
VLS-Grating Soft X-ray reflectometry
(JAEA) |
| BL-12 |
ξXό°χΎ |
Soft X-ray microscopy |
| BL-13 |
SMILEU |
SR micro lithography and etching for micro/nano fabrication |
| BL-14 |
SMILET |
SR micro lithography and etching for micro/nano fabrication |
| BL-15 |
ΤO°χΎ |
Infrared Microscopy |