F A C I L I T I E S |
( Engineering Experiment Labo. 2 ) CLEAN ROOM |
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EQUIPMENT | MODEL | MANUFACTURER |
DIFFUSION FURNACES & ANNEAL FURNACES | @ | RIKEN |
PLASMA CVD MACHINE | ocQSOO | SAMCO |
RIE MACHINE | qhd|POm | SAMCO |
SPATTERING MACHINE | @ | ULVAC |
da EVAPORATOR | @ | ULVAC |
VACUUM EVAPORATOR | @ | ULVAC |
WIRE BONDER | SPQS(l) | Kulicke & Soffa (Japan) LTD |
WET ETCHING & CLEANING STATION | @ | YAMATO |
( Engineering Experiment Labo. 2 ) CLEAN ROOM |
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EQUIPMENT | MODEL | MANUFACTURER |
da LITHOGRAPHY SYSTEM | iaw|TOOOkr | JEOL |
BOTH SIDE ALIGNER | odl|WOO | UNION |
MASK ALIGNER | @ | KYOWA |
PHOTO FORMING MACHINE | @ | DENKEN |
( SR Center , Engineering Experiment Labo. 2 ) FACILITIES OF LIGA PROCESS |
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EQUIPMENT | MODEL | MANUFACTURER |
SYNCHROTRON RADIATION LIGHT SOURCE | `tqnq` | SHI |
EXPOSURE CHAMBER FOR X-RAY LITHOGRAPHY | @ | SHI |
m ELECTROFORMING BATH | @ | NIKKO METAL PLATING, etc. |
RESIST WORK STATION | @ | @ |