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PUBLISHED PAPERS & PRESENTATIONS BY SUGIYAMA LAB.

<Apr. 2001 - Mar. 2002>

last modified : May 22, 2002

No. PRESEN-
TATION
AUTHOR / COAUTHOR TITLE JOURNAL & PUBLISHER / CONFERENCE NAME
1 PAPER Takanori Katoh, Nobuyoshi Nishi, Masafumi Fukagawa, Hiroshi Ueno and Susumu Sugiyama Direct Writing for Three-Dimensional Microfabrication Using Synchrotron Radiation Etching Sensors and Actuators, A, Physical, Vol.89, pp.10-15 (2001)
2 PAPER Shinsuke Takimoto, Hiroshi Ueno, Susumu Sugiyama, Masahiro Yamaguchi, Makoto Baba and Ken-Ichi Arai Fabrication of Thick Film Magnetic Cores for High Frequency Using LIGA Process Memoires of the SR Center, Ritsumeikan University, No.3, Apr. 2001, pp. 33-41.
3 PAPER Nobuyoshi Nishi, Takanori Katoh, Hiroshi Ueno and Susumu Sugiyama Three-Dimensional Micromachining of PTFE Using Synchrotron Radiation Light Memoires of the SR Center, Ritsumeikan University, No.3, Apr. 2001, pp. 43-51.
4 PAPER Hiroshi Ueno and Susumu Sugiyama A Study on the Sub-Micron LIGA Process Memoires of the SR Center, Ritsumeikan University, No.3, Apr. 2001, pp. 53-65.
5

PAPER

Chisato Yoshimura, Yasunori Kobayashi, Hikoharu Aoki, Hiroshi Ueno and Susumu Sugiyama Development of Plastic Injection Molding Using the LIGA Process Memoires of the SR Center, Ritsumeikan University, No.3, Apr. 2001, pp. 67-83.
6

PAPER

Yuji Hikida, Kenji Yoshifuji, Susumu Sugiyama and Satoshi Konishi High Aspect Ratio Structure for a Capacitive Low-G Accelerometer Memoires of the SR Center, Ritsumeikan University, No.3, Apr. 2001, pp. 157-158.
7 PAPER Nobuyoshi Nishi, Takanori Katoh, Hiroshi Ueno and Susumu Sugiyama Three-Dimensional Micromachining of PTFE Using Synchrotron Radiation Light Trans. IEE of Japan, Vol. 121-E, No.4, Apr. 2001, pp.204-208.
8 PAPER Yasutada Tanimoto, Toshiyuki Toriyama and Susumu Sugiyama Characteristics of Polycrystalline Si Nano Wire Piezoresistors Trans. IEE of Japan, Vol. 121-E, No.4, Apr. 2001, pp.209-214.
9 PAPER Chisato Yoshimura, Yasunori Kobayashi, Hikoharu Aoki, Hiroshi Ueno and Susumu Sugiyama Development of Plastic Injection Molding Using the LIGA Process Trans. IEE of Japan, Vol. 121-E, No.5, May 2001, pp.266-274.
10 PAPER Dao Viet Dzung, Toshiyuki Toriyama, John Wells and Susumu Sugiyama Design of a Micro Multi-Axis Force-Moment Sensor Trans. IEE of Japan, Vol.122-E, No.1, Jan. 2002, IEEJ, pp.35-41.
11 INTERNATIONAL CONFERENCE Toshiyuki Toriyama, Yasutada Tanimoto and Susumu Sugiyama Single Crystalline Silicon Nano Wire Piezoresistors for Mechanical Sensors Transducers'01 Eurosensors XV, Digest of Technical Papers, The 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, June 10-14, 2001, pp.1002-1005, Springer.
12 INTERNATIONAL CONFERENCE Toshiyuki Toriyama and Susumu Sugiyama n-Type β-SiC Piezoresistance Analysis Under High Temperature and High Impurity Concentration Transducers'01 Eurosensors XV, Digest of Technical Papers, The 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, June 10-14, 2001, pp.1414-1417, Springer.
13 INTERNATIONAL CONFERENCE Susumu Sugiyama and Hiroshi Ueno Novel Shaped Microstructures Processed by Deep X-Ray Lithography Transducers'01 Eurosensors XV, Digest of Technical Papers, The 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, June 10-14, 2001, pp.1574-1577, Springer.
14 INTERNATIONAL CONFERENCE Hiroshi Ueno and Susumu Sugiyama Novel Shaped Microstructures Processed by Deep X-Ray Lithography Using Plane Pattern-Cross Section Transfer Technique HARMST '01, Fourth Int'l Workshop on High-Aspect-Ratio Micro-Structure Technology, Baden-Baden, Germany, June 17-19, 2001, pp.15-16.
15 INTERNATIONAL CONFERENCE Nobuyoshi Nishi, Takanori Katoh, Hiroshi Ueno and Susumu Sugiyama Study on Three-dimensional Micromachining Using Synchrotron Radiation Etching HARMST '01, Fourth Int'l Workshop on High-Aspect-Ratio Micro-Structure Technology, Baden-Baden, Germany, June 17-19, 2001, pp.37-38.
16 INTERNATIONAL CONFERENCE Shinsuke Takimoto, Hiroshi Ueno, Susumu Sugiyama, Masahiro Yamaguchi, Makoto Baba and Ken-Ichi Arai Fabrication of Thick Film Magnetic Core with High Aspect Ratio and Long Stucture Using LIGA HARMST '01, Fourth Int'l Workshop on High-Aspect-Ratio Micro-Structure Technology, Baden-Baden, Germany, June 17-19, 2001, pp.207-208.
17 INTERNATIONAL CONFERENCE Satoshi Nakano, Toshiyuki Toriyama and Susumu Sugiyama Sensitivity Analysis for a Piezoresistive Rotary Movement Micro Gyroscope MHS 2001, IEEE Proceedings of the 2001 Int'l Symposium on Micromechatronics and Human Science, Nagoya, Japan, Sept. 9-12, 2001, pp.87-92.
18 INTERNATIONAL CONFERENCE Dzung Viet Dao, Toshiyuki Toriyama, John Wells and Susumu Sugiyama Micro Force-Moment Sensor with Six-Degree of Freedom MHS 2001, IEEE Proceedings of the 2001 Int'l Symposium on Micromechatronics and Human Science, Nagoya, Japan, Sept. 9-12, 2001, pp.93-98.
19 INTERNATIONAL CONFERENCE Susumu Sugiyama Fabrication of Microstructures Using Synchrotron Radiation Micro Lithography and Etching (SMILE) MHS 2001, Int'l Symposium on Micromechatronics and Human Science, Nagoya, Japan, Sept. 9-12, 2001.
20 INTERNATIONAL CONFERENCE Dzung Viet Dao, Toshiyuki Toriyama, John Wells and Susumu Sugiyama Six-degree of Freedom Piezoresistive Force-moment Micro Sensor Proc. of the Int'l Sensor Conf. 2001, Seoul, Korea, pp.19-22, Oct.11-12, 2001, Korean Sensors Soc./Intelligent Microsystem Center/IEEE Sensors Council
21 INTERNATIONAL CONFERENCE Toshiyuki Toriyama, Daisuke Funai and Susumu Sugiyama Electro-Mechanical Properties of Single Crystal Silicon Nano Wire Proc. of the 2001, 1st IEEE Conf. on Nanotechnology (IEEE-NANO 2001), Oct. 28-30, Hawaii, pp.516-521 (2001)
22 INTERNATIONAL CONFERENCE Susumu Sugiyama Strategy of R&D for Next Generation Micromachine Technology-Prospect for Manufacturing Technology- The 7th Int'l Micromachine Symposium, Oct. 31-Nov. 1, 2001, Tokyo
23 INTERNATIONAL CONFERENCE Susumu Sugiyama SMILE(Synchrotron Radiation Micro Lithography and Etching) at Ritsumeikan University SRRC Seventh User's Meeting & Workshop, Meeting Booklet, Oct.31-Nov.2, 2001, Taiwan, Synchrotron Radiation Research Center
24 INTERNATIONAL CONFERENCE Susumu Sugiyama Synchrotron Radiation Micro Lithography and Etching (SMILE) for MEMS Fabrication Digest of Papers Microprocesses and Nanotechnology 2001, 2001 Int'l Microprocesses and Nanotechnology Conf. (MNC 2001), pp.264-265, Oct.31-Nov.2, 2001, Shimane, Japan
25 INTERNATIONAL CONFERENCE Dzung Viet Dao, Toshiyuki Toriyama, John Wells and Susumu Sugiyama Six-degree of Freedom Micro Force-moment Sensor for Application in Geophysics (MEMS2002)The 15th IEEE Int'l Conference on Micro Electro Mechanical Systems, pp.312-315, Jan.20-24, 2002, Las Vegas, Nevada, USA
26 DOMESTIC CONFERENCE Masakazu Yajima, Toshiyuki Toriyama and Susumu Sugiyama Self-standing Polysilicon-metal Thermopile for Micro Power Generator Technical Digest of the 18th Sensor Symposium 2001, pp.93-97, The Institute of Electrical Engineers of Japan (May 2001)
27 DOMESTIC CONFERENCE Toshinori Unno, Toshiyuki Toriyama, M.M.I. Bhuiyan, Yoshihiko Yokoyama and Susumu Sugiyama Micro Connector for High Packaging Density Fabricated by Using UV Thick Photoresist Technical Digest of the 18th Sensor Symposium 2001, pp.165-170, The Institute of Electrical Engineers of Japan (May 2001)
28 DOMESTIC CONFERENCE H. Matsui, M. Yoda, T. Toriyama, S. Konishi and S. Sugiyama Fabrication of a Condenser Microphone by Multi-User Integrated Chip Service Technical Digest of the 18th Sensor Symposium 2001, pp.259-262, The Institute of Electrical Engineers of Japan (May 2001)
29 DOMESTIC CONFERENCE Dzung Viet Dao, Toshiyuki Toriyama, John Wells and Susumu Sugiyama Micro Multi-Axis Force-Moment Sensor Technical Digest of the 18th Sensor Symposium 2001, pp.273-278, The Institute of Electrical Engineers of Japan (May 2001)
30 DOMESTIC CONFERENCE Satoshi Nakano, Toshiyuki Toriyama and Susumu Sugiyama A Piezoresistive Rotary Movement Micro Gyroscope Technical Digest of the 18th Sensor Symposium 2001, pp.289-292, The Institute of Electrical Engineers of Japan (May 2001)
31 DOMESTIC CONFERENCE 杉山 進 放射光リソグラフィーによる三次元マイクロマシンの製作 「商業化を目指した微細加工のキーテクノロジーとテクノリンケージ」精密工学会他共催、つくば、pp.6-15 (2001.8)
32 DOMESTIC CONFERENCE 杉山 進 放射光リソグラフィーによる三次元マイクロマシンの製作 (第20回メカトロニクスフォーラム/IEEE四国フォーラム)「知能メカトロニクス専門委員会研究会報告」精密工学会他共催、香川大学 (2001.8)
33 DOMESTIC CONFERENCE 海野敏典、鳥山寿之、杉山 進 UV厚膜レジストを用いた高密度実装用マイクロコネクタの製作と特性評価 (MES2001)第11回マイクロエレクトロニクスシンポジウム論文集、大阪大学コンベンションセンター、JIEP, pp.299-302 (2001.10)
34 DOMESTIC CONFERENCE 宮野公樹、多賀谷和範、川瀬和典、飴山 惠、杉山 進 粉末焼結法による微小TiNi 形状記憶合金構造体の製作 電気学会研究会資料、マイクロマシン・センサシステム研究会、MSS-02-1〜13、電気学会, pp.1-6 (2002.2)
35 DOMESTIC CONFERENCE 浅田和彦、赤鹿久美子、川瀬和典、宮野公樹、杉山 進 LIGAプロセスによる連立撮像眼モジュール用隔壁の製作 電気学会研究会資料、マイクロマシン・センサシステム研究会、MSS-02-1〜13、電気学会, pp.7-10 (2002.2)
36 DOMESTIC CONFERENCE 西嶋洋一、Dao Viet Dzung、鳥山寿之、杉山 進 精密マニピュレーションのための多軸力覚センサの製作と評価 電気学会研究会資料、マイクロマシン・センサシステム研究会、MSS-02-1〜13、電気学会, pp.17-22 (2002.2)
37 DOMESTIC CONFERENCE 船井大輔、鳥山寿之、杉山 進 単結晶シリコンナノワイヤーブリッジのピエゾ抵抗効果の評価 平成14年電気学会全国大会講演論文集、工学院大学、2002年3月26-29日(CD-ROM) 第3分冊 p.144 (2002.3)
38 OTHER
(SYMPOSIUM,etc)
杉山 進 SR光を用いた三次元マイクロ加工(SMILE)とマイクロマシニング・試作サービス(MICS) 日本機械学会関西支部・東海支部合同企画第34回座談会資料、大阪、pp.33-40 (2001.11)
39 OTHER
(SYMPOSIUM,etc)
杉山 進 放射光を利用した三次元マイクロ構造の製作と応用 日本原子力産業会議「むつ小川原地域における放射光施設整備研究会」、札幌、pp.21-30 (2001.11)
40 OTHER
(SYMPOSIUM,etc)
杉山 進 「LIGAプロセスによる3次元微細加工」−シンクロトロン放射光を用いた構造の製作と応用− 機能性材料の3次元微細加工技術講演会「平成12年度機能性材料の3次元微細加工技術に関する調査研究報告書」(財)先端加工機械技術振興協会、東京 、pp.55-63 (2001.12)
41 OTHER
(SYMPOSIUM,etc)
杉山 進 SRを用いた超微細加工 第9回シンポジウム、原子・分子レベルで制御した材料創製とキャラクタリゼーション「超微細加工とキャラクタリゼーション」大阪電気通信大学、応用物理学会関西支部、精密工学会関西支部、他 (2001.12)
42 OTHER
(SYMPOSIUM,etc)
杉山 進 新産業創出のキーとなるマイクロ・ナノマシンテクノロジー 第21回研究成果の活用・事業化促進検討グループ、(社)関西経済連合会、大阪 (2001.12)