( Engineering Experiment Labo. 2 )

da LITHO. LAB.

LAYOUT of da Litho.Lab. & Photo Litho.Lab.


Pattern with the size in nano order can be formed by using electron beam writer. 
Data from CAD-workstation are directly linked to EB writer for fabrication of photomask
and X-ray mask.

EB LITHO. LAB.

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