PHOTO LITHO. LAB.＿＿＿＿＿ＥＢ LITHO. LAB.
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|---|---|---|---|
| No. | PHOTO LITHO. LAB. | No. | ＥＢ LITHO. LAB. |
１ |
RESIST COATER | ７ |
ＥＢ LITHOGRAPHY SYSTEM |
２ |
OPTICAL MICROSCOPE | ８ |
AIR SHOWER |
３ |
CLEAN OVEN | ||
４ |
PHOTO FORMING MACHINE | ||
５ |
BOTH SIDE ALIGNER | ||
６ |
MASK ALIGNER | ||
