MICRO PROCESS LAB‚r. (I) & (II)
ƒ C L E A N __R O O M „


LAB. ( II )QQQQQQQQQLAB. ( I )

No.

MICRO PROCESS
LAB. ( II )

No.

MICRO PROCESS
LAB. ( I )

‚P

GAS CYLINDER CAB.

11

DIFFUSION FURNACES

‚Q

MULTI LAYER FILM
CVD MACHINE

12

ANNEAL FURNACES

‚R

‚d‚a EVAPORATOR

13

LIQUID PHASE EPI-
REACTOR

‚S

VACUUM EVAPORA-
TOR

14

‚m‚‰ ELECTROFORMING
BATH

‚T

ELIPSOMETER

15

WET BENCH

‚U

BONDER

‚V

PLASMA ‚b‚u‚c
MACHINE

‚W

‚q‚h‚d MACHINE

‚X

SPUTTERING MACHINE

10

COMPRESSOR

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