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2003年度 杉山・田中研究室 論文・学会発表

Apr. 2003 - Mar. 2004

last modified : Nov. 25, 2011

No. 発表形態 著者/発表者 著書・論文名等 出版社/掲載誌/学会名等
1 著書
(部分執筆)
杉山 進 ナノテクノロジーハンドブックT編 創る(第1分冊)、ナノテクノロジーハンドブック編集委員会編、5章ナノ構造の製作技術、5・3 LIGAプロセス オーム社、pp.197-203 (2003.5)
1 論文
(紀要)
N. Miyano, H. Iwasa, K. Isonishi, K. Ameyama and S. Sugiyama Fabrication of Nano-Grained TiC/Ti5Si3 Micro-Molds by the LIGA-MA Process Memoirs of the SR Center, Ritsumeikan University, No. 5, April 2003, pp.9-16 (2003.4)
2 論文
(紀要)
Hideki Tosa, Shinji Furuta, Toshiyuki Kouzaki, Chisato Yoshimura, Hikoharu Aoki, Norihiko Samoto and Susumu Sugiyama Polymer Microneedle Array for Medical Application Using Synchrotron Radiation Lithography Memoirs of the SR Center, Ritsumeikan University, No. 5, April 2003, pp.99-101 (2003.4)
3 論文 Dzung Viet Dao, Toshiyuki Toriyama, John Wells and Susumu Sugiyama Silicon Piezoresistive Six-Degree of Freedom Force-Moment Micro Sensor Sensors and Materials, MYU, Tokyo, Vol. 15, No. 3, pp.113-135 (2003.5)
4 論文 宮野公樹、多賀谷和範、川瀬和典、飴山惠、杉山進 MA-SPS粉末焼結法のLIGAプロセスへの応用 材料、日本材料学会、第52巻、第7号、pp.783-788 (2003.7)
5 論文

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宮野公樹、杉山進、飴山惠 放電プラズマ焼結法を利用した金属間化合物系材料の製造 材料の科学と工学(日本材料科学会誌)、日本材料科学会、第40巻 第4号、pp.24-28 (2003.8)
6 論文 Susumu Sugiyama and Toshiyuki Toriyama Design of a Micro Reciprocating Engine for Power Generation 電気学会論文誌E、IEEJ Transactions on Sensors and Micromachines, Vol.123, No.9, 2003, The Institute of Electrical Engineers of Japan, pp.351-356 (2003.9)
7 論文 T. Toriyama and S. Sugiyama Single Crystal Silicon Piezoresistive Nano-Wire Bridge Sensors and Actuators A Physical, Vol.108 (2003), Elsevier, pp.244-249 (2003)
8 論文 Naoki Miyano, Kazunori Tagaya, Kazunori Kawase, Kei Ameyama and Susumu Sugiyama Fabrication of Alloy and Ceramic Microstructures by LIGA-MA-SPS Process Sensors and Actuators A Physical, Vol.108 (2003), Elsevier, pp.250-257 (2003)
9 論文 N. Miyano, H. Iwasa, K. Isonishi, S. Tanaka, S. Sugiyama and K. Ameyama Application of Pseud-superplasticity to Produce TiN/Ti5Si3 and TiC/Ti5Si3 Nano Grain Composites for Micro Molding Materials Science Forum, Vols.447-448, pp.311-316 (2004)
10 論文

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S. Khumpuang, R. Maeda and S. Sugiyama Microneedle Array and Insertion Guide Array for Safe Use of Biomedical Applications Proceedings of SPIE: BioMEMS and Nanotechnology, 10-12 Dec. 2003, Perth, Australia, SPIE-The Int'l Soc. for Optical Engineering, Vol.5275, pp.231-238 (2004)
1 国際学会発表 N. Miyano, H. Iwasa, K. Isonishi, K. Ameyama and S. Sugiyama Fabrication of Nano-Grained TiC/Ti5Si3 Micro-Molds by the LIGA-MA Process (IPMM-2003) The 4th Int'l Conference on Intelligent Processing and Manufacturing of Materials, May 18-23, 2003, Sendai, Japan (2003.5)
2 国際学会発表 Toshiyuki Toriyama and Susumu Sugiyama Piezoresistance Analysis of n-type 6H-SiC for High-Temperature Mechanical Sensors (Transducers'03)The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, IEEE (2003.6)
3 国際学会発表 Dzung Viet Dao, Toshiyuki Toriyama, John Wells and Susumu Sugiyama A MEMS-Based Microsensor to Measure All Six Components of Force and Moment on a Near-Wall Particle in Turbulent Flow (Transducers'03)The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, IEEE (2003.6)
4 国際学会発表 Y. Isono, J. Tada, T. Watanabe, T. Unno, S Sugiyama and T. Toriyama Elevated Temperature Tensile/Creep Test of UV-LIGA Nickel Thin Fillm for Design of High-Density Micro Cennector (Transducers'03)The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, IEEE (2003.6)
5 国際学会発表

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Toshiyuki Toriyama, Kenji Hashimoto and Susumu Sugiyama Design and Fabrication of a Resonant Micro Reciprocating Engine for Power Generation (Transducers'03)The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, IEEE (2003.6)
6 国際学会発表 Naoki Miyano, Hiroshi Iwasa, Michito Matsumoto, Kei Ameyama and Susumu Sugiyama Application of LIGA-MA Process to Metal/Ceramics Nano-Composite Microstructure (HARMST 2003) High Aspect Ratio Micro-Structure Technology Workshop, Jun. 15-17, 2003, California, USA (2003.6)
7 国際学会発表 Naoki Miyano, Hiroshi Iwasa, Michito Matsumoto, Kei Ameyama and Susumu Sugiyama Application of LIGA-MA Process to Metal/Ceramics Nano-Composite Microstructure MRS-J, Yokohama, October (2003.10)
8 国際学会発表 S.Khumpuang, R.Maeda and S.Sugiyama Design and Fabrication of a Coupled Microneedle Array and Insertion Guide Array for Safe Penetration through Skin IEEE (MHS2003) Proceedings of the 2003 International Symposium on Micro-NanoMechatronics and Human Science, Nagoya, Oct.19-22, 2003, pp.233-237 (2003.10)
9 国際学会発表 <Best Paper Award in 2003 Int'l Symposium on MHS>
S.Hasebe, J.Ogawa, T.Toriyama, S.Sugiyama, H.Ueno and K.Itoigawa
<IEEE-MHS2003最優秀論文賞受賞>
Design and Fabrication of Flexible Thermopile for Power Generation
IEEE (MHS2003) Proceedings of the 2003 International Symposium on Micro-NanoMechatronics and Human Science, Nagoya, Oct.19-22, 2003, pp.287-291 (2003.10)
10 国際学会発表 K.Hashimoto, J.Ogawa, T.Toriyama and S.Sugiyama Design and Fabrication of a Resonant Micro Reciprocating Engine for Power Generation IEEE (MHS2003) Proceedings of the 2003 International Symposium on Micro-NanoMechatronics and Human Science, Nagoya, Oct.19-22, 2003, pp.293-297 (2003.10)
11 国際学会発表

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Susumu Sugiyama MEMS (Micro Electro Mechanical Systems) - From Research to Commercialization - (ISC2003)Proceedings of Sensors Conference 2003, International Sensor Conference 2003, Nov.14-15, 2003, Korea Institute of Science and Technology, The Korean Sensors Society, Vol.14, No.1, pp.15-16 (2003.11)
12 国際学会発表 T. Toriyama, K. Hashimoto, J. Ogawa and S. Sugiyama Micro Reciprocating Engine Based on SOI Structure (PowerMEMS 2003) 3rd International Workshop on Micro and Nano Technology for Power Generation and Energy Conversion Applications, Dec.4-5, 2003, Makuhari, Global Emerging Technology Institute(GETI) and Institute of Electrical Engineers of Japan (2003.12)
13 国際学会発表 S. Khumpuang, R. Maeda and S. Sugiyama Microneedle Array and Insertion Guide Array for Safe Use of Biomedical Applications SPIE Int'l Symposium on Microelectronics, MEMS, and Nanotechnology 2003, Dec. 10-12, 2003, Perth, Australia (2003.12)
14 国際学会発表
(Poster)
S.Hasebe, J.Ogawa, M.Shiozaki, T.Toriyama, S.Sugiyama, H.Ueno and K.Itoigawa Polymer Based Smart Flexible Thermopile for Power Generation (MEMS 2004) Technical Digest, 17th IEEE Int'l Conference on Micro Electro Mechanical Systems, Jan.25-29, 2004, Maastricht, The Netherlands, pp.689-692 (2004.1)
15 国際学会発表 Dzung Viet Dao, Machiko Koshigoe, Van Thanh Dau, Toshiyuki Toriyama and Susumu Sugiyama Sensitivity Analysis for an Ultra Small Accelerometer Using Nanowire Piezoresistor IEEE NDSI 2004, Conference digests of the IEEE International Conference on Nanoscale Devices and System Integration, Miami, Florida, Feb. 15-19, 2004, p.166 (2004.2)
16 国際学会発表

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S.Khumpuang, G.Kawaguchi and S.Sugiyama Quadruplets-microneedle Array for Blood Extraction NSTI (Nanotech 2004) Proceeding of the 2004 Nanotechnology Int'l Conference and Trade Show, Boston, U.S.A., Mar.7-10, 2004, Nano Science and Technololgy Institute (2004.3)
1 国内学会発表 A.T. Nguyen, D.V. Dao, V.T. Dau, M. Takahashi, T. Toriyama, J.C. Wells and S. Sugiyama Measurement of Loads Acting on a Near-Wall Particle in Turbulent Water Flow by Using a 6-DOF MEMS-Based Sensor Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan, pp.139-144 (2003.7)
2 国内学会発表 K. Nagai, R. Fujimoto, S. Miyawaki, N. Oshie, S. Toda and S. Sugiyama Consideration on the Properties of a Small Position Sensor with Low Temperature Drift Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan, pp.205-208 (2003.7)
3 国内学会発表 Y. Yamada, Y. Kinoshita, D.V. Dzung, T. Toriyama, S. Sugiyama and M. Harada Design of a Three Axis Force Sensor Based on SOI-MICS Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan, pp.253-258 (2003.7)
4 国内学会発表 Naoki Miyano, Hiroshi Iwasa, Kei Ameyama and Susumu Sugiyama Micro-Structures of TiC/Ti5Si3 Composite Fabricated by LIGA-MA Process Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan, pp.387-390 (2003.7)
5 国内学会発表

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J.Ogawa, S.Hasebe, T.Toriyama, S.Sugiyama, H.Ueno and K.Itoigawa Fabrication of Flexible Thermopile for Power Generation Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan, pp.347-351 (2003.7)
6 国内学会発表 G.Kawaguchi, N.Samoto, H.Tosa and S.Sugiyama Investigation of X-ray Mask Patterns for Fabrication of Micro Needle Array Using SR Lithography Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan, pp.397-400 (2003.7)
7 国内学会発表 杉山 進 MEMSが拓くメカトロニクスの将来 第8回知能メカトロニクスワークショップ講演論文集、滋賀、精密工学会、pp.1-6 (2003.8)
8 国内学会発表 G.Kawaguchi, S.Khumpuang and S.Sugiyama Optimization of Actual Microneedle Tip-Size Resulted from Tilt-Angle and Designed Patterns of X-ray Mask 第8回知能メカトロニクスワークショップ講演論文集、滋賀、精密工学会、pp.57-61 (2003.8)
9 国内学会発表 A.T. Nguyen, D.V. Dao, T. Toriyama, J.C. Wells and S. Sugiyama Measurement of Loads Acting on a Near-Wall Particle in Turbulent Water Flow by Using a 6-DOF MEMS-Based Sensor 第8回知能メカトロニクスワークショップ講演論文集、滋賀、精密工学会、pp.67-72 (2003.8)
10 国内学会発表 宮野公樹、杉山 進 Fabrication and Application of 3D Micro/Nano Structures by SR Lithography 第17回日本エム・イー学会秋季大会、10月20-22日、けいはんなプラザ(けいはんな学研都市)(2003.10)
11 国内学会発表

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海野敏典、鳥山寿之、磯野吉正、杉山 進 高密度実装用マイクロコネクタの特性評価 第18回エレクトロニクス実装学術講演大会講演論文集、東京工業大学、平成16年3月、(社)エレクトロニクス実装学会、pp.193-194 (2004.3)
1 その他 (講演) 杉山 進 LIGAプロセスの産業への応用事例 平成15年度第3回ナノテク研究会、(社)滋賀工業会、pp.1-12 (2003.7)
2 その他 (執筆) 杉山 進 放射光リソグラフィーによる3次元マイクロ・ナノ構造の製作 化学工業、化学工業社、第54巻 第11号、pp.51-55 (2003.11)
3 その他 (講演) 杉山 進 LIGAによる3次元超微細構造体の加工 第47回放射光産業利用技術懇談会 放射光国際シンポジウム−21世紀の放射光源とその利用−、放射光産業利用技術懇談会主催 (2003.11)
4 その他 (解説) 杉山 進 LIGAプロセスによる3次元微細加工 塑性と加工−マイクロ・ナノ加工小特集号−(日本塑性加工学会誌)、第44巻 第514号、pp.9-12 (2003.11)
5 その他 (講演) 杉山 進 放射光によるナノ/マイクロマシンの作製 応用物理学会結晶工学分科会年末講演会テキスト、pp.33-37 (2003.12)
6 その他 (執筆)

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杉山 進 放射光による微細加工 高分子、特集:放射光と高分子、(社)高分子学会、53巻 2月号、pp.70-73 (2004.2)