2004年度 杉山・田中研究室 論文･学会発表
Apr. 2004 - Mar. 2005
（last modified : Apr. 1, 2005）
| No. | 発表形態 | 著者／発表者 | 著書・論文名等 | 出版社／掲載誌／学会名等 |
| 1 | 論文 | Susumu Sugiyama, Sommawan Khumpuang and Gaku Kawaguchi | Plain-pattern to Cross-section Transfer (PCT) Technique for Deep X-ray Lithography and Applications | Journal of Micromechanics and Microengineering, Institute of Physics Publishing, Vol.14, pp.1399-1404 (2004.10) |
| 1 | 国際学会発表 | Sommawan Khumpuang, Gaku Kawaguchi and Susumu Sugiyama | Optimization of Quadruplets-Microneedle Array for Maximum Blood Extraction | (APCOT MNT 2004) Asia-Pacific Conf. of Transducers and Micro-Nano Technology / (ICEE2004) Int'l Conference on Electrical Engineering 2004, July 4-8, 2004, Sapporo, Japan, Conference Proceedings, Vol.3-1, pp.203-206(2004.7) |
| 2 | 国際学会発表 | Van Thanh Dau, Tatsuo Shiozawa, Dzung Viet Dao, Hideo Kumagai and Susumu Sugiyama | Design and Fabrication of Semiconductor Gas Gyroscope | (APCOT MNT 2004) Asia-Pacific Conf. of Transducers and Micro-Nano Technology / (ICEE2004) Int'l Conference on Electrical Engineering 2004, July 4-8, 2004, Sapporo, Japan, Conference Proceedings, Vol.3-1, pp.257-262 (2004.7) |
| 3 | 国際学会発表 | Dzung Viet Dao, Machiko Koshigoe, Ranjith Amarasinghe, Toshiyuki Toriyama and Susumu Sugiyama | Design of an Ultra Small Accelerometer Utilizing Si Nanowire Piezoresistors | (APCOT MNT 2004) Asia-Pacific Conf. of Transducers and Micro-Nano Technology / (ICEE2004) Int'l Conference on Electrical Engineering 2004, July 4-8, 2004, Sapporo, Japan, Conference Proceedings, Vol.3-1, pp.459-464 (2004.7) |
| 4 | 国際学会発表 ▲Top |
Ranjith Amarasinghe, Dzung Viet Dao, Toshiyuki Toriyama, Sadao Akishita and Susumu Sugiyama | A Silicon Micromachined Six Degree of Freedom Piezoresistive Accelerometer for Biomedical Application | (APCOT MNT 2004) Asia-Pacific Conf. of Transducers and Micro-Nano Technology / (ICEE2004) Int'l Conference on Electrical Engineering 2004, July 4-8, 2004, Sapporo, Japan , Conference Proceedings, Vol.3-1, pp.443-448(2004.7) |
| 5 | 国際学会発表 | Anh Tuan Nguyen, Dzung Viet Dao, Toshiyuki Toriyama, John C. Wells and Susumu Sugiyama | Measurement of Loads Acting on a Near-Wall Particle in Turbulent Water Flow by Using a 6-Dof MEMS-Based Sensor | (APCOT MNT 2004) Asia-Pacific Conf. of Transducers and Micro-Nano Technology / (ICEE2004) Int'l Conference on Electrical Engineering 2004, July 4-8, 2004, Sapporo, Japan, Conference Proceedings, Vol.3-1, pp.508-512 (2004.7) |
| 6 | 国際学会発表 | Naoki Miyano, Hiroshi Iwasa, Kazuo Isonishi, Kei Ameyama and Susumu Sugiyama | Application of Nano-grain Composites for Fabrication of LIGA Micro-Structures Using a Pseudo-Superplasticity | (APCOT MNT 2004) Asia-Pacific Conf. of Transducers and Micro-Nano Technology / (ICEE2004) Int'l Conference on Electrical Engineering 2004, July 4-8, 2004, Sapporo, Japan, Conference Proceedings, Vol.3-1, pp.557-562(2004.7) |
| 7 | 国際学会発表 (Invited) |
S. Sugiyama | State of the Art MEMS Technology | IEEE (IMFEDK) The 2004 International Meeting for Future of Electron Devices, Kansai, July 26-28, Kyoto Univ., Tutorial Session Lecture (2004.7) |
| 8 | 国際学会発表(Poster) | Yigui Li and Susumu Sugiyama | Dye Laser Microcavity Resonator Based on X-ray Lithography | IEEE/LEOS(Laser and Electro Optical Soc.) (Opical MEMS 2004) Int'l Conference on Optical MEMS and Their Applications, Aug. 22-26, 2004, Takamatsu, Kagawa, Japan, pp.130-131 (2004.8) |
| 9 | 国際学会発表 ▲Top |
Ranjith Amarasinghe, Dzung Viet Dao, Toshiyuki Toriyama and Susumu Sugiyama | Design & Fabrication of Piezoresistive Six Degree of Freedom Accelerometer for Biomechanical Applications | (ICMENS2004)The International Conference on MEMS, NANO and Smart Systems, Aug.25-27, 2004, Banff, Alberta, Canada (2004.8) |
| 10 | 国際学会発表 | Y. Li and S. Sugiyama | Fabrication of Gratings on a PMMA Concave Lens Surface by Double X-ray Lithography | (IEEE MOC 2004)Proceedings, The 10th Microoptics Conference, Sept. 1-3, 2004, Friedrich-Schiller-Univ., Jena, Germany, K-6(CD-ROM) (2004.9) |
| 11 | 国際学会発表 | Khumpuang Sommawan and Susumu Sugiyama | Novel-Shaped Microneedle Arrays for Multiple Uses of Bio-Medical Applications | (IEEE ICSICT2004) The 7th Int'l Conference on Solid-State and Integrated-Circuit Technology, Beijing, China (2004.10) |
| 12 | 国際学会発表 | Van Thanh Dau, Tatsuo Shiozawa, Dzung Viet Dao, Hideo Kumagai and Susumu Sugiyama | A Dual Axis Silicon Gyroscope Based on Thermal Convective Effect | (IEEE Sensors2004) The 3rd Int'l Conference on Sensors, Oct.24-27, 2004, Vienna Univ. of Technology, Vienna, Austria, IEEE Sensors Council (2004.10) |
| 13 | 国際学会発表 |
Ranjith Amarasinghe, Dzung Viet Dao, Toshiyuki Toriyama and Susumu Sugiyama | A Silicon Micromachined Six-Degree of Freedom Piezoresistive Accelerometer | (IEEE Sensors2004) The 3rd Int'l Conference on Sensors, Oct.24-27, 2004, Vienna Univ. of Technology, Vienna, Austria, IEEE Sensors Council (2004.10) |
| 14 | 国際学会発表 | Dzung Viet Dao, Toshiyuki Toriyama and Susumu Sugiyama | Noise and Frequency Analyses of a Miniaturized 3-DOF Accelerometer Utilizing Silicon Nanowire Piezoresistors | (IEEE Sensors2004) The 3rd Int'l Conference on Sensors, Oct.24-27, 2004, Vienna Univ. of Technology, Vienna, Austria, IEEE Sensors Council (2004.10) |
| 15 | 国際学会発表 ▲Top |
Toshinori Unno, Toshiyuki Toriyama, Yoshitada Isono and Ssusumu Sugiyama | Characteristics of Ni Electroformed Micro Connector Used for High Density Packaging | (IEEE MHS2004/Micro-Nano COE) Proceedings of the 2004 Int'l Symposium on Micro-NanoMechatronics and Human Science/The 4th Symposium "Micro-NanoMechatronics for an Information-Based Society" The 21st Century COE Program, Nagoya Univ., Nagoya, Oct.31-Nov. 3, 2004, pp.105-108 (2004.11) |
| 16 | 国際学会発表 | Yigui Li and Susumu Sugiyama | X-ray Lithography Fabrication of Large Diffractive Optical Elements on a Curve Surface | (IEEE MHS2004/Micro-Nano COE) Proceedings of the 2004 Int'l Symposium on Micro-NanoMechatronics and Human Science/The 4th Symposium "Micro-NanoMechatronics for an Information-Based Society" The 21st Century COE Program, Nagoya Univ., Nagoya, Oct.31-Nov. 3, 2004, pp.115-119 (2004.11) |
| 17 | 国際学会発表 | Dzung Viet Dao, Shigeya Okada, Van Thanh Dau, Toshiyuki Toriyama and Susumu Sugiyama | Development of a 3-DOF Silicon Piezoresistive Micro Accelerometer | (IEEE MHS2004/Micro-Nano COE) Proceedings of the 2004 Int'l Symposium on Micro-NanoMechatronics and Human Science/The 4th Symposium "Micro-NanoMechatronics for an Information-Based Society" The 21st Century COE Program, Nagoya Univ., Nagoya, Oct.31-Nov. 3, 2004, pp.271-276 (2004.11) |
| 18 | 国際学会発表 | Tatsuo Shiozawa, Van Thanh Dau, Dzung Viet Dao, Hideo Kumagai and Susumu Sugiyama | A Dual Axis Thermal Convective Silicon Gyroscope | (IEEE MHS2004/Micro-Nano COE) Proceedings of the 2004 Int'l Symposium on Micro-NanoMechatronics and Human Science/The 4th Symposium "Micro-NanoMechatronics for an Information-Based Society" The 21st Century COE Program, Nagoya Univ., Nagoya, Oct.31-Nov. 3, 2004, pp.277-282 (2004.11) |
| 19 | 国際学会発表(Invited) | Susumu Sugiyama | MEMS Technology as a Key of New Industry Creation | (ICMT2004) Proceedings of The 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology/Vietnamese Association of Mechanics, pp.41-47 (2004.11) |
| 20 | 国際学会発表 | Dzung Viet Dao, Shigaya Okada, Toshiyuki Toriyama and Susumu Sugiyama | Development of a 3-DOF Silicon Piezoresistive Micro Accelerometer Based on MEMS Technology | (ICMT2004) Proceedings of The 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology/Vietnamese Association of Mechanics, pp.341-346(2004.11) |
| 21 | 国際学会発表 ▲Top |
Dzung Viet Dao, Machiko Koshigoe, Toshiyuki Toriyama and Susumu Sugiyama | Design and Simulation of an Ultra Small 3-DOF Accelerometer Utilizing Piezoresistive Effect in Si Nanowire | (ICMT2004) Proceedings of The 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology/Vietnamese Association of Mechanics, pp.359-364(2004.11) |
| 22 | 国際学会発表 | Y.Q.Nguyen, D.V.Dao, J.C.Wells, M.Takahashi, T.Toriyama and S.Sugiyama | A New Design of a 6-DOF MEMS-based Sensor for Measuring Hydrodynamic Loads Acting on a Hemisphere | (ICMT2004) Proceedings of The 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology/Vietnamese Association of Mechanics, pp.373-377(2004.11) |
| 23 | 国際学会発表 | Van Thanh Dau, Tatsuo Shiozawa, Dzung Viet Dao, Hideo Kumagai and Susumu Sugiyama | Study on a Dual Axis Thermal Convective Gas Gyroscope Utilizing Low-Doped Si Micro Thermistor | (ICMT2004) Proceedings of The 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology/Vietnamese Association of Mechanics, pp.391-395(2004.11) |
| 24 | 国際学会発表 (Invited:Special Guest Speech) |
Susumu Sugiyama | New Progress of Integration and Fusion in MEMS -Expectation for New Industry Creation- | Proceedings, The 10th International Micromachine/Nanotech Symposium, Tokyo, Nov. 11, 2004, (Special Lecture), Micromachine Center, pp.1-10 (2004.11) |
| 25 | 国際学会発表(Poster) | Y.Li and S.Sugiyama | X-ray Lithography Mask Fabricated by Excimer Laser Process | SPIE Photonics Asia 2004/(APOC2004)Asia-Pacific Optical Communications, Nov.8-12, Beijing, China [CD:5641-58:S3](2004.11) |
| 26 | 国際学会発表 | Y.Li, S.Khumpuang and S.Sugiyama | Two New Types of Microneedle Array Fabricated by X-ray Lithography | SPIE Photonics Asia 2004/(APOC2004)Asia-Pacific Optical Communications, Nov.8-12, Beijing, China [CD:5641-35:S7](2004.11) |
| 27 | 国際学会発表(Poster) | J.Ogawa, Y.Okada, Y.Suzuki, T.Toriyama and S.Sugiyama | Design and Fabrication of Micro Combustion Rig for Micro Reciprocating Engine | (PowerMEMS 2004) The 4th Int'l Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Nov. 28-30, 2004, Kyoto, Japan, Research Inst. for Micro System Technology, Ritsumeikan Univ., co-sponsored by IEEJ Sensors and Micromachines Soc., et al., Technical Digest, pp.80-83 (2004.11) |
| 28 | 国際学会発表 ▲Top |
M.Shiozaki, T.Toriyama, S.Sugiyama, H.Ueno and K.Itoigawa | Fabrication of Flexible Thermopile Generator Sheet | (PowerMEMS 2004) The 4th Int'l Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Nov. 28-30, 2005, Kyoto, Japan, Research Inst. for Micro System Technology, Ritsumeikan Univ., co-sponsored by IEEJ Sensors and Micromachines Soc., et al., Technical Digest, pp.195-198 (2004.11) |
| 29 | 国際学会発表(Poster) | H.Horade, S.Khumpuang and S.Sugiyama | Method for Accurately Shape-prediction of 3D Structure Fabricated by X-ray Lithography | SPIE Int'l Symposium on Smart Materials, Nano-, and Micro-Smart Systems 2004, Dec. 12-15, 2004, Univ. of New South Wales, Sydney, Australia (2004.12) |
| 30 | 国際学会発表 | S.Khumpuang and S.Sugiyama | Fabrication and Simulation of Novel Crown-shaped Microneedle Array | SPIE Int'l Symposium on Smart Materials, Nano-, and Micro-Smart Systems 2004, Dec. 12-15, 2004, Univ. of New South Wales, Sydney, Australia (2004.12) |
| 31 | 国際学会発表 (Poster) |
R.Amarasinghe, D.V.Dao, T.Toriyama and S.Sugiyama | Design and Fabricaton of Miniaturized Six-Degree of Freedom Piezoresistive Accelerometer | IEEE (MEMS 2005) Technical Digest, The 18th IEEE Int'l Conference on Micro Electro Mechanical Systems, Miami Beach, Florida, USA, Jan.30-Feb.3, 2005, IEEE and the Robotics and Automation Soc., pp.351-354 (2005.2) |
| 32 | 国際学会発表 (Poster) |
V.T.Dau, T.Shiozawa, D.V.Dao, H.Kumagai and S.Sugiyama | A Dual Axis Gas Gyroscope Utilizing Low-Doped Silicon Thermistor | IEEE (MEMS 2005) Technical Digest, The 18th IEEE Int'l Conference on Micro Electro Mechanical Systems, Miami Beach, Florida, USA, Jan.30-Feb.3, 2005, IEEE and the Robotics and Automation Soc., pp.626-629 (2005.2) |
| 33 | 国際学会発表 ▲Top |
Yoshitada Isono, Mario Kiuchi, Susumu Sugiyama, Takahiko Morita and Sinji Matsui | Mechanical Characteristics of FIB Deposited Carbon Nanowire by Electrostatic Actuated Nano Tensile Testing Devices (EANAT) | IEEE (MEMS 2005) Technical Digest, The 18th IEEE Int'l Conference on Micro Electro Mechanical Systems, Miami Beach, Florida, USA, Jan.30-Feb.3, 2005, IEEE and the Robotics and Automation Soc., pp.883-886 (2005.2) |
| 1 | 国内学会発表 | J.Ogawa, Y.Okada, T.Toriyama and S.Sugiyama | Fabrication of a Micro Reciprocating Engine for Power Generation | Proceedings of the 21th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 14-15, 2004, Kyoto, The Institute of Electrical Engineers of Japan, pp.47-50 (2004.10) |
| 2 | 国内学会発表 | M.Shiozaki, J.Ogawa, S.Hasebe, T.Toriyama, S.Sugiyama | Fabrication of Flexible Thermopile Generator Sheet | Proceedings of the 21th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 14-15, 2004, Kyoto, The Institute of Electrical Engineers of Japan, pp.57-60 (2004.10) |
| 3 | 国内学会発表 | Ranjith Amarasinghe, Dzung Viet Dao, Toshiyuki Toriyama, and Susumu Sugiyama | Design & Fabrication of Miniaturized Piezoresistive Six-Degree of Freedom Accelerometer | Proceedings of the 21th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 14-15, 2004, Kyoto, The Institute of Electrical Engineers of Japan, pp.365-370 (2004.10) |
| 4 | 国内学会発表 | Kazuhiro Okada, Tetsuya Kakutani, Hiromichi Itano, Yoshiyuki Matsu, Susumu Sugiyama | Development of 6-axis Motion Sensors Using Piezoelectric Elements | Proceedings of the 21th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 14-15, 2004, Kyoto, The Institute of Electrical Engineers of Japan, pp.385-390 (2004.10) |
| 5 | 国内学会発表 | K. Tanaka, W. Kuze, T. Konishi, A. Shimazu and S. Sugiyama | Microbonding of Pb(Zr,Ti)O3 Bulk Ceramics to Si Single Crystals | Proceedings of the 21th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 14-15, 2004, Kyoto, The Institute of Electrical Engineers of Japan, pp.469-472 (2004.10) |
| 6 | 国内学会発表 | S. Khumpuang, M. Horade, K. Fujioka, and S. Sugiyama | Alignment X-ray Lithography for Hole Perforating Through PCT-Microneedle | Proceedings of the 21th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 14-15, 2004, Kyoto, The Institute of Electrical Engineers of Japan, pp.497-500 (2004.10) |
| 7 | 国内学会発表 ▲Top |
宮野尚哉、阿部悠平、杉山 進 | 集団同期のネットワークセンシングへの応用 | 電子情報通信学会技術研究報告、NLP2004-67〜75［非線形問題］Vol.104、No.471、pp.41-43 (2004.11) |
| 1 | その他 (執筆) | 杉山 進 | 放射光リソグラフィーによる三次元マイクロ・ナノ構造の形成 | 応用物理、第73巻第4号、応用物理学会、pp.466-469 (2004.4) |
| 2 | その他 (報告) | Khumpuang Sommawan | SPIE's International Symposium on Microelectronics, MEMS, and Nanotechnology: International Conference Report | IEEJ Transactions on Sensors and Micromachines, The Institute of Electrical Engineers of Japan, Vol.124, No.4, pp.154-155 (2004.4) |
| 3 | その他 (執筆) | 杉山 進 | 立命館大学21世紀COEプログラム「マイクロ・ナノサイエンス・集積化システム」の紹介 | 電気学会論文誌E、Vol.124、No.4、pp.156-157 (2004.4) |
| 4 | その他 (講演) | 杉山 進 | 21世紀COEプログラム｢マイクロ・ナノサイエンス・集積化システム｣の概要 | センサ・アクチュエータ・マイクロマシン／ウィーク 2004 総合シンポジウム、Session 2：「マイクロ・ナノ技術１−COEと研究・開発支援」、東京ビッグサイト、次世代センサ協議会, pp.1-6 (2004.4) |
| 5 | その他 (報告) | 杉山 進 | 放射光リソグラフィーによる三次元マイクロ・ナノ構造の製作 | ナノブローブテクノロジー第167委員会 第34回研究会資料、（独）日本学術振興会, pp.9-14 (2004.4) |
| 6 | その他 (講演) ▲Top |
杉山 進 | 新産業創出のキーとなるMEMSテクノロジー | ｻｲﾊﾞﾈﾃｨｯｸ・ﾌﾚｷｼﾌﾞﾙ･ｵｰﾄﾒｰｼｮﾝ（CFA）研究分科会第15回例会「先端生産技術の最近の動向」、草津市、システム制御情報学会ｻｲﾊﾞﾈﾃｨｯｸ・ﾌﾚｷｼﾌﾞﾙ･ｵｰﾄﾒｰｼｮﾝ（CFA）研究分科会 (2004.6) |
| 7 | その他 (講演) | 杉山 進 | 新産業創出のキーとなるMEMSテクノロジー | MMCファンドリーサービス産業委員会 第3回MEMS講習会「MEMSの設計・加工技術と応用例」、東京、（財）ﾏｲｸﾛﾏｼﾝｾﾝﾀｰﾌｧﾝﾄﾞﾘｰｻｰﾋﾞｽ産業委員会 (2004.7) |
| 8 | その他 (講演) | 杉山 進 | 新産業創出のキーとなるMEMSテクノロジー | センシング技術応用研究会 第142回研究例会資料、大阪、pp.1-6 (2004.9) |
| 9 | その他 (講演) | 杉山 進 | 新産業創出のキーとなるMEMSテクノロジー | システム制御情報セミナー2004、大阪、システム制御情報学会 (2004.10) |
| 10 | その他 (講演) | 杉山 進 | 放射光リソグラフィーによる三次元マイクロ・ナノ構造の製作 | 平成16年度つくば新技術講座、つくば市、TCIつくば研究支援センター (2004.11) |
| 11 | その他 (講演) | Sommmawan Khumpuang and Susumu Sugiyama | Microneedle Array Fabricated by Synchrotron Radiation Lithography for Multiple Uses of Bio-Medical Applications | 平成16年度つくば新技術講座、つくば市、TCIつくば研究支援センター (2004.11) |
| 12 | その他 (講演) | 杉山 進 | 立命館におけるMEMS研究 | MEMS技術分科会 第5回MEMS技術分科会、京都、大阪産業技術総合研究所センシング技術応用研究会MEMS技術分科会 (2004.12) |
| 13 | その他 (講演) | 杉山 進 | MEMS技術の開発動向と将来展望 | 計測展2004 OSAKA、フォーラム講演、大阪、（社）日本電気計測器工業会 (2004.12) |
| 14 | その他 (招待講演) | 杉山 進 | MEMSの集積・融合の進展と新産業創出への期待 | 日本真空協会関西支部総会講演、大阪、日本真空協会関西支部 (2005.1) |
| 15 | その他 (講演) ▲Top |
杉山 進 | 新産業創出のキーとなるMEMSテクノロジー | MMCファンドリーサービス産業委員会 第4回MEMS講習会「MEMSの設計・加工技術と応用例」、京都、（財）ﾏｲｸﾛﾏｼﾝｾﾝﾀｰﾌｧﾝﾄﾞﾘｰｻｰﾋﾞｽ産業委員会 （2005.1） |