2006年度 杉山・田中研究室 論文･学会発表
Apr. 2006 - Mar. 2007
（last modified : Mar.20, 2007）
| No. | 発表形態 | 著者／発表者 | 著書・論文名等 | 出版社／掲載誌／学会名等 |
| 1 | 紀要 論文 |
Fumiki Kato, Shinya Fujinawa, Makoto Tsudo and Susumu Sugiyama | Simulation and Fabrication of Submicron 3D Structure by PCT (Plane-pattern to the Cross-section Transfer) Technique | Memoires of the SR Center, Ritsumeikan University, No.8, Apr. 2006, pp.3-12 (2006.4). |
| 2 | 紀要 論文 |
S, Khumpuang, M. Horade, K. Fujioka and S. Sugiyama | Geometrical Improvements of Hollow Microneedle Fabrications by Alighnment X-ray Lithography | Memoires of the SR Center, Ritsumeikan University, No.8, Apr. 2006, pp.13-18 (2006.4). |
| 3 | 紀要 論文 |
S. Khumpuang, M. Horade, K. Fujioka and S. Sugiyama | Capillary Rise Modeling and Fabrication of Crown-shaped Microneedle Array for Blood Extraction | Memoires of the SR Center, Ritsumeikan University, No.8, Apr. 2006, pp.19-26 (2006.4). |
| 4 | 紀要 論文 |
S. Fujinawa, F. Kato and S. Sugiyama | Development of Fabrication Process for Shape-controlled Three-dimensional Nanostructures | Memoires of the SR Center, Ritsumeikan University, No.8, Apr. 2006, pp.27-35 (2006.4). |
| 5 | 紀要 |
M. Horade, S. Khumpuang, K. Fujioka, S. Kajita and S. Sugiyama | Shape-Prediction of Microstructures Fabricated by PCT Technique | Memoires of the SR Center, Ritsumeikan University, No.8, Apr. 2006, pp.37-44 (2006.4). |
| 6 | 論文 | Sommawan Khumpuang, Mitsuhiro Horade, Kazuya Fujioka and Susumu Sugiyama | Microneedle Fabrication Using the Plane Pattern to Cross-section Transfer Method | Smart Materials and Structures, Institute of Physics Publishing Ltd., UK, Apr. 2006, Vol.15, No.2, pp.600-606 (2006.4). |
| 7 | 論文 | Katsuhiko Tanaka, Takahiro Konishi, Masato Ide and Susumu Sugiyama | Wafer Bonding of
Lead Zirconate Titanate to Si Using an Intermediate Gold Layer for Microdevice Application |
Journal of Micromechanics and Microenginnering, IOP Publishing Ltd, UK, Apr. 2006, Vol.16, No.4, pp.815-820 (2006.4). |
| 8 | 論文 | Yuhei Abe, Takaya Miyano and Susumu Sugiyama | Application of Collective Synchronization to Sensor Data Processing | IEEJ Transactions on Sensors and Micromachines, The Institute of Electrical Engineers of Japan, Vol. 126, No.5, 2006, pp.185-189 (2006.5). |
| 9 | 論文 | Van Thanh Dau, Dzung Viet Dao, Masahiro Hayashida, Thien Xuan Dinh and Susumu Sugiyama | A Dual Axis Accelerometer Utilizing Low Doped Silicon Thermistor | IEEJ Transactions on Sensors and Micromachines, The Institute of Electrical Engineers of Japan, Vol. 126, No.5, 2006, pp.190-194 (2006.5). |
| 10 | 論文 |
岡田和廣、角谷哲哉、松 良幸、渡部善幸、三井俊明、峯田 貴、杉山 進 | SOI ウェハを用いた5軸モーションセンサとその設計一手法 | 電気学会論文誌E、126巻6号、2006年、pp.261-268 (2006.6). |
| 11 | 論文 | Van Thanh Dau, Dzung Viet Dao, Tatsuo Shiozawa, Hideo Kumagai and Susumu Sugiyama | Development of a Dual-axis Thermal Convective Gas Gyroscope | Journal of Micromechanics and Microengineering, Institute of Physics Publishing Ltd, UK, July 2006, Vol.16, No.7, pp.1301-1306 (2006.7). |
| 12 | 論文 | Takahiro Konishi, Masato Ide, Katsuhiko Tanaka and Susumu Sugiyama | Fabrication of Diaphragm Actuator Using Bulk PZT | IEEJ Transactions on Sensors and Micromachines, The Institute of Electrical Engineers of Japan, Vol. 126, No.7, 2006, pp.302-305 (2006.7). |
| 13 | 論文 | Phuc Hong Pham, Dzung Viet Dao, Satoshi Amaya, Ryoji Kitada, Yigui Li and Susumu Sugiyama | Design and Fabrication of Polymer Electrostatic Comb-Drive Actuators for Micro Conveyer Systems | IEEJ Transactions on Sensors and Micromachines, The Institute of Electrical Engineers of Japan, Vol. 126, No.7, 2006, pp.306-311 (2006.7). |
| 14 | 論文 | Fuminori Tanaka, Shigeo Maeda, Kenji Nagashima, Yoshiki Tsuchiya, Katsuhiko Tanaka, Akira Ishii and Susumu Sugiyama | Mirror Deformation by Piezoelectric Actuators | IEEJ Transactions on Sensors and Micromachines, The Institute of Electrical Engineers of Japan, Vol. 126, No.7, 2006, pp.325-329 (2006.7). |
| 15 | 論文 |
Fumiki Kato, Shinya Fujinawa and Susumu Sugiyama | Simulation for Submicron 3D-Structures based on Plane-pattern to the Cross-section Transfer (PCT) Technique | IEEJ Transactions on Sensors and Micromachines, The Institute of Electrical Engineers of Japan, Vol. 126, No.7, 2006, pp.330-333 (2006.7). |
| 16 | 論文 | Ranjith Amarasinghe, Dzung Viet Dao, Toshiyuki Toriyama and Susumu Sugiyama | Development of Miniaturized 6-axis Accelerometer Utilizing Piezoresistive Sensing Elements | Sensors and Actuators A: Physical, Elsevier, Vol.134, Issue 2, pp.310-320 (2006.7) |
| 17 | 論文 | 糸魚川貢一、神戸正方、小出輝彦、福田敏男、新井史人、杉山 進 | シリコン歪ゲージを用いた力計測用マイクロセンサ－力センサの構造設計，試作，評価実験－ | 日本ロボット学会誌、第24巻6号、2006年、pp.754-765 (2006.9). |
| 18 | 論文 | Sho Sasaki, Takeshi Fujiwara, Satoshi Nozoe, Fumihiko Sato, Koichi Imanaka and Susumu Sugiyama | A Micromachined Thermal Flow Sensor Applied to a PC Mouse Device | IEEJ Transactions on Sensors and Micromachines, The Institute of Electrical Engineers of Japan, Vol. 126, No.11, 2006, pp.607-611 (2006.11). |
| 19 | 論文 | T.Seki, Y.Uno, K.Narise, T.Masuda, K.Inoue, S.Sato, F.Sato, K.Imanaka and S.Sugiyama | Development of a Large-force Low-loss Metal-contact RF MEMS Switch | Sensors and Actuators A: Physical, Elsevier, Nov.20, 2006, Vol.132, Issue 2, pp.683-688 (2006.11). |
| 20 | 論文 |
Ranjith Amarasinghe, Dzung Viet Dao, Toshiyuki Toriyama and Susumu Sugiyama | Simulation, Fabrication and Characterization of a Three-axis Piezoresistive Accelerometer | Smart Materials and Structures, Institute of Physics Publishing Ltd., UK, Dec.2006, Vol.15, No.6, pp.1691-1699 (2006.12). |
| 21 | 論文 | Phuc Hong Pham, Dzung Viet Dao, Satoshi Amaya, Ryoji Kitada and Susumu Sugiyama | Straight Movement of Micro Containers Based on Ratchet Mechanism and Electrostatic Comb-drive Actuators | Journal of Micromechanics and Microengineering, Institute of Physics Publishing Ltd, UK, Dec.2006, Vol.16, No.12, pp.2532-2538 (2006.12). |
| 22 | 論文 | Mitsuhiro Horade, Sommawan Khumpuang, Kazuya Fujioka and Susumu Sugiyama | Mask Design Compensation for Sloped Sidewall Structures Fabricated by X-ray Lithography | Microsystem Technologies, Springer Berlin/Heidelberg, Feb. 2007, Vol.13, No.3-4, pp.215-219 (2007.2). |
| 23 | 論文 | Sommawan Khumpuang, Mitsuhiro Horade, Kazuya Fujioka and Susumu Sugiyama | Geometrical Strengthening and Tip-sharpening of a Microneedle Array Fabricated by X-ray Lithography | Microsystem Technologies, Springer Berlin/Heidelberg, Feb. 2007, Vol.13, No.3-4, pp.209-214 (2007.2). |
| 24 | 論文 | Yigui Li and Susumu Sugiyama | Fabrication of Microgratings on PMMA Plate and Curved Surface by Using Copper Mesh as X-ray Lithography Mask | Microsystem Technologies, Springer Berlin/Heidelberg, Feb. 2007, Vol.13, No.3-4, pp.227-230 (2007.2). |
| 25 | 論文 |
Fumiki Kato, Shinya Fujinawa, Yigui Li and Susumu Sugiyama | Fabrication of High Aspect Ratio Nano Gratings Using SR Lithography | Microsystem Technologies, Springer Berlin/Heidelberg, Feb. 2007, Vol.13, No.3-4, pp.221-225 (2007.2). |
| 26 | 論文 |
Dzung Viet Dao, Qiang Wang and Susumu Sugiyama | Fabrication and Characterization of 3-DOF Soft-Contact Tactile Sensor Utilizing 3-DOF Micro Force Moment Sensor | IEEJ Transactions on Sensors and Micromachines, The Institute of Electrical Engineers of Japan, Vol. 127, No.3, 2007, pp.177-181 (2007.3). |
| 27 | 論文 |
Phuc Hong Pham, Dzung Viet Dao, Satoshi Amaya, Ryoji Kitada and Susumu Sugiyama | Fabrication and Characterization of Smooth Si Mold for Hot Embossing Process | IEEJ Transactions on Sensors and Micromachines, The Institute of Electrical Engineers of Japan, Vol. 127, No.3, 2007, pp.187-191 (2007.3). |
| 1 | 国際学会発表 Poster |
Ling-Han Li, Yigui Li, Takeshi Hashishin and Susumu Sugiyama | Fabrication of Alumina X-Ray Lithography Mask for Sub-Micron Structure Basing on Anodizing Method | (APCOT2006) Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore, Jun. 25-28, 2006, IEEE (2006.6). |
| 2 | 国際学会発表 <Best Student Paper Award> |
Dzung Viet Dao, Qiang Wang, Yusuke Sei and Susumu Sugiyama | Development of 4-DOF Soft Fingertip Sensor Utilizing Micro Force Moment Sensing Chip | (APCOT2006) Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore, Jun. 25-28, 2006, IEEE (D-18) (2006.6). |
| 3 | 国際学会発表 | Dzung Viet Dao, Phuc Hong Pham and Susumu Sugiyama | A Novel Micro Conveyer System based on Ratchet Mechanism and Electrostatic Comb-drive Actuators | (APCOT2006) Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore, Jun. 25-28, 2006, IEEE (D-31) (2006.6). |
| 4 | 国際学会発表 | Phuc Hong Pham, Dzung Viet Dao, Satoshi Amaya, Ryoji Kitada and Susumu Sugiyama | A Si Micro Conveyer System with Straight Displacement based on Reciprocating Motions of Ratchet Mechanism and Electrostatic Comb-drive Actuators | (ISFA2006) Proceedings of 2006 Int'l Symposium on Flexible Automation, Osaka, Japan, July 10-12, 2006, ISCIE/ASME-DSC, pp.397-400 (2006.7). |
| 5 | 国際学会発表 | Masahiro Hayashida, Van Thanh Dau, Dzung Viet Dao, Tatsuo Shiozawa and Susumu Sugiyama | A Gas Accelerometer with Low Thermal Stress Thermistor | (ISFA2006) Proceedings of 2006 Int'l Symposium on Flexible Automation, Osaka, Japan, July 10-12, 2006, ISCIE/ASME-DSC, pp.765-768 (2006.7). |
| 6 | 国際学会発表 ▲Top |
Ranjith Amarasighe, Dzung Viet Dao and Susumu Sugiyama | Sensitivity Improved Miniaturized Piezoresistive Accelerometer for Biomechanical Applications | (ISFA2006) Proceedings of 2006 Int'l Symposium on Flexible Automation, Osaka, Japan, July 10-12, 2006, ISCIE/ASME-DSC, pp.116-119 (2006.7). |
| 7 | 国際学会発表 | Tadayoshi Hata, Dzung Viet Dao, Hirotaka Tsuyoshi and Susumu Sugiyama | Theoretical and Experimental Study on Micro Fluidic Actuator Utilizing Surface Acoustic Wave | (ISFA2006) Proceedings of 2006 Int'l Symposium on Flexible Automation, Osaka, Japan, July 10-12, 2006, ISCIE/ASME-DSC, pp.120-123 (2006.7). |
| 8 | 国際学会発表 |
Dzung Viet Dao, Qiang Wang, Yusuke Sei and Susumu Sugiyama | Development of a Soft Fingertip Sensor Utilizing MEMS-based Multi-axis Force Sensor | (ISFA2006) Proceedings of 2006 Int'l Symposium on Flexible Automation, Osaka, Japan, July 10-12, 2006, ISCIE/ASME-DSC, pp.128-131 (2006.7). |
| 9 | 国際学会発表 | Sho Sasaki, Tomonori Seki and Susumu Sugiyama | Batteryless Accelerometer Using Power Feeding System of RFID | (SICE-ICCAS 2006) Proceeding of SICE-ICASE International Joint Conference 2006, Oct.18-21, Busan, Korea, pp.3567-3570 (2006.10). |
| 10 | 国際学会発表 | Ikuo Fujii, Takahiro Inoue, Dzung Viet Dao, Susumu Sugiyama and Shinichi Hirai | Tactile Perception Using Micro Force/Moment Sensor Embedded in Soft Fingertip | (IEEE Sensors 2006) Proceedings of the 5th IEEE Conference on Sensors, Daegu, Korea, Oct.22-25, 2006 (B1L-D4), pp.558-562 (2006.10). |
| 11 | 国際学会発表 ▲Top |
Dzung Viet Dao, Van Thanh Dau, Masahiro Hayashida, Thien Xuan Dinh, Tatsuo Shiozawa and Susumu Sugiyama | Fabrication and Characterization of 2-DOF Micro Convective Accelerometer | (IEEE Sensors 2006) Proceedings of the 5th IEEE Conference on Sensors, Daegu, Korea, Oct.22-25, 2006 (C3L-E1), pp.1353-1356 (2006.10). |
| 12 | 国際学会発表 | Dzung Viet Dao and Susumu Sugiyama | Development of 4-DOF Soft-Contact Tactile Sensor and Application to Gripping Operation of Robotics Fingers | (IEEE Sensors 2006) Proceedings of the 5th IEEE Conference on Sensors, Daegu, Korea, Oct.22-25, 2006 (C3L-C3), pp.1321-1324 (2006.10). |
| 13 | 国際学会発表 | Van Thanh Dau, Dzung Viet Dao, Tatsuo Shiozawa, Hideo Kumagai and Susumu Sugiyama | Development of a Dual Axis Convective Gyroscope with Embedded Heater and Low Thermal-stress Thermistors | (IEEE Sensors 2006) Proceedings of the 5th IEEE Conference on Sensors, Daegu, Korea, Oct.22-25, 2006 (C3L-E5), pp.1369-1372 (2006.10). |
| 14 | 国際学会発表 | Nam Cao Hoai Le, Dzung Viet Dao, John Wells and Susumu Sugiyama | Design, Simulation and Fabrication of a Monolithic Total Internal Reflection (TIR) Chip for Fluorescent-based Bio Detection | (IEEE MHS 2006) Proceedings of IEEE MHS 2006 (2006 Int'l Symposium on Micro-NanoMechatronics and Human Science), Nov.6-8, 2006, Nagoya, Japan, IEEE Robotics & Automation Soc. et al., pp.30-34 (2006.11). |
| 15 | 国際学会発表 ▲Top |
Ling-Han Li, Dzung Viet Dao and Susumu Sugiyama | Design and Simulation of an Intergrated Metal Oxide Based Micro NO2 Gas Sensor | (IEEE MHS 2006) Proceedings of IEEE MHS 2006 (2006 Int'l Symposium on Micro-NanoMechatronics and Human Science), Nov.6-8, 2006, Nagoya, Japan, IEEE Robotics & Automation Soc. et al., pp.25-29 (2006.11). |
| 16 | 国際学会発表 | Shipeng Li, Yigui Li, Phuc Hong Pham, Dzung Viet Dao and Susumu Sugiyama | Study on Fabrication of Polymer Eletrostatic Comb-drive Actuator by DXRL Technique | (IEEE MHS 2006) Proceedings of IEEE MHS 2006 (2006 Int'l Symposium on Micro-NanoMechatronics and Human Science), Nov.6-8, 2006, Nagoya, Japan, IEEE Robotics & Automation Soc. et al., pp.83-88 (2006.11). |
| 17 | 国際学会発表 | Yigui Li and Susumu Sugiyama | X-ray Lithography Fabrication of Poly-L-Lactides Microstructures | (IEEE MHS 2006) Proceedings of IEEE MHS 2006 (2006 Int'l Symposium on Micro-NanoMechatronics and Human Science), Nov.6-8, 2006, Nagoya, Japan, IEEE Robotics & Automation Soc. et al., pp.79-82 (2006.11). |
| 18 | 国際学会発表 |
Dzung Viet Dao and Susumu Sugiyama | Fabrication and Characterization of 4-DOF Soft-contact Tactile Sensor and Application to Robot Fingers | (IEEE MHS 2006) Proceedings of IEEE MHS 2006 (2006 Int'l Symposium on Micro-NanoMechatronics and Human Science), Nov.6-8, 2006, Nagoya, Japan, IEEE Robotics & Automation Soc. et al., pp.263-268 (2006.11). |
| 19 | 国際学会発表 Poster ▲Top |
Ryuji Yokokawa, Soichiro Tamaoki, Takashi Sakamoto, Akira Murakami and Susumu Sugiyama | Characterization of mRNA Detection Device in Liquid Phase | (μTAS 2006) The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Nov. 5-9, 2006, Tokyo, Soc. For Chemistry and Micro-Nano Systems/Chemical and Biological Microsystems Soc. (2006.11). |
| 20 | 国際学会発表 | M.Horade, M.Tsudo, S.Khumpuang and S.Sugiyama | 3-Dimensional Microfabrication of Polytetrafluoroethylene by Using Synchrotron Radiation | (IDW '06) Proceedings of the 13th International Display Workshops, Dec.7, 2006, Otsu, The Inst. of Image Information and Television Engineers/The Soc. for Information Display (Late-News Paper MEMS2-7L) Vol.2, pp.1561-1562 (2006.12). |
| 21 | 国際学会発表 | F.Kato, S.Fujinawa and S.Sugiyama | Performance of Flexible SR-exposure Stages for Mutiple Purposes in Micro/Nanofabrication | (IDW '06) Proceedings of the 13th International Display Workshops, Dec.7, 2006, Otsu, The Inst. of Image Information and Television Engineers/The Soc. for Information Display (Late-News Paper MEMS3-5L) Vol.2, pp.1577-1578 (2006.12). |
| 22 | 国際学会発表 | Yigui Li and Susumu Sugiyama | Microfabrication of PLLA Polymer by X-ray Lithography | (SPIE) Smart Materials, Nano- and Micro-Smart Systems, 10-13 Dec., 2006, Adelaide, Australia (Proc. of SPIE, Vol.6415, 64150H) (2006.12). |
| 23 | 国際学会発表 Poster ▲Top |
S.Khumpuang, K.Fujioka and S.Sugiyama | Development of Bio-chemical Sensor System Integrated with Blood Extraction Device | (IEEE-NEMS) Proceedings of the 2nd IEEE Int'l Conference on Nano/Micro Engineered and Molecular Systems, Jan.16-19, 2007, Bangkok, Thailand, IEEE Nanotechnology Council et al., pp.847-850 (2007.1). |
| 1 | 国内学会発表 Poster |
玉置宗一朗、横川隆司、坂本 隆、村上 章、杉山 進 | 液相トランスクリプトーム解析デバイスの開発 | （13th CHEMINAS）第13回化学とマイクロ・ナノシステム研究会、講演要旨集、2006年5月16日～17日、東京大学生産技術研究所、化学とマイクロ・ナノシステム研究会主催、電気学会E部門共催、PC-003 (2006.5). |
| 2 | 国内学会発表 | 田中克彦、土屋芳城、石井 明、杉山 進、田中史記、前田重雄、長島賢治 | 圧電アクチュエータを用いた焦点可変ミラー | （FMA-23）第23回強誘電体応用会議、京都、2006年5月24～27日、強誘電体応用会議主催、電気学会他協賛 (2006.5). |
| 3 | 国内学会発表 | 濱崎良平、浅田和彦、田中克彦、杉山 進 | アルミ薄膜構造体を用いた静電駆動型マイクロミラーデバイスの製作 | 2006年（平成18年）秋季 第67回応用物理学会学術講演会、滋賀、立命館大学、2006年8月29-9月1日、講演予稿集、No.3 (19P-ZX-6)、p.1072 (2006.8). |
| 4 | 国内学会発表 Poster |
Phuc Hong Pham, Dzung Viet Dao, Satoshi Amaya, Ryoji Kitada and Susumu Sugiyama | Fabrication and Characterization of Smooth Si Mold for Hot Embossing Process | Proceedings of the 23rd Sensor Symposium on Sensors, Micromachine and Applied Systems, Oct.5-6, 2006, Takamatsu, Kagawa, Japan, pp.185-188 (2006.10). |
| 5 | 国内学会発表 Poster ▲Top |
Asamitsu Sakai, Dzung Viet Dao, Akira Okamura, and Susumu Sugiyama | Fabrication of an Ultra Small 3-DOF Accelerometer Utilizing Small External Influence Structure and Si Nanoscale Piezoresistors | Proceedings of the 23rd Sensor Symposium on Sensors, Micromachine and Applied Systems, Oct.5-6, 2006, Takamatsu, Kagawa, Japan, pp.270-273 (2006.10). |
| 6 | 国内学会発表 Poster |
M. Ide, R. Sakamoto, K. Tanaka, S. Sugiyama and N. Wada | Fabrication of Micropump Using Bulk PZT | Proceedings of the 23rd Sensor Symposium on Sensors, Micromachine and Applied Systems, Oct.5-6, 2006, Takamatsu, Kagawa, Japan, pp.193-196 (2006.10). |
| 7 | 国内学会発表 Poster |
Yoshiki Tsuchiya, Katsuhiko Tanaka, Akira Ishii, Susumu Sugiyama, Fuminori Tanaka, Shigeo Maeda and Kenji Nagashima | Varifocal Mirror Using Low-driving-voltage Piezoelectric Actuators | Proceedings of the 23rd Sensor Symposium on Sensors, Micromachine and Applied Systems, Oct.5-6, 2006, Takamatsu, Kagawa, Japan, pp.221-224 (2006.10). |
| 8 | 国内学会発表 | Dzung Viet Dao, Yuki Takashima, Qiang Wang and Susumu Sugiyama | Fabrication and Characterization of 3-DOF Soft-Contact Tactile Sensor Utilizing Micro Force Moment Sensor | Proceedings of the 23rd Sensor Symposium on Sensors, Micromachine and Applied Systems, Oct.5-6, 2006, Takamatsu, Kagawa, Japan, pp.433-436 (2006.10). |
| 9 | 国内学会発表▲Top |
Van Thanh Dau, Dzung Viet Dao, Thien Xuan Ding, Tatsuo Shiozawa, Masahiro Hayashida, Hideo Kumagai and Susumu Sugiyama | Optimization of PZT Diaphragm Pump to Enhance Circular Flow and Application to Convective Gyroscope | Proceedings of the 23rd Sensor Symposium on Sensors, Micromachine and Applied Systems, Oct.5-6, 2006, Takamatsu, Kagawa, Japan, pp.459-462 (2006.10). |
| 1 | その他 (紀要) | Shipeng Li, Yigui Li, Phuc Hong Pham, Dzung Viet Dao, Satoshi Amaya, Ryoji Kitada and Susumu Sugiyama | Study on Fabrication of Polymer Electrostatic Comb-drive Actuator by X-ray Lithography | (Short Notes) Memoires of the SR Center, Ritsumeikan University, No.8, Apr. 2006, pp.177-178 (2006.4). |
| 2 | その他 (紀要) | Yigui Li, Dzung Viet Dao and Susumu Sugiyama | Microfabrication of Thick Through Silicon for Use as X-ray Lithography Masks | (Short Notes) Memoires of the SR Center, Ritsumeikan University, No.8, Apr. 2006, pp.179-180 (2006.4). |
| 3 | その他 (紀要) | Yigui Li and Susumu Sugiyama | Novel Poly-L-Lactides Micromachining by X-ray Lithography | (Short Notes) Memoires of the SR Center, Ritsumeikan University, No.8, Apr. 2006, pp.181-182 (2006.4). |
| 4 | その他 (講演) | 杉山 進 | MEMS・集積化の進展と新産業創出への期待 | 2006年（平成18年）秋季 第67回応用物理学会学術講演会付随、第39回応用物理学会スクール（2006年秋季）、滋賀、立命館大学、2006年8月30日 (2006.8). |
| 5 | その他 (招待 講演) ▲Top |
杉山 進 | MEMS (Micro Electro Mechanical Systems) の研究開発動向と新産業創出への期待 | 平成18年度 総合講座Ⅰ、名城大学理工学部、名城大学天白ｷｬﾝﾊﾟｽ、名古屋市、平成18年7月8日 (2006.7). |
| 6 | その他 (講演) | 杉山 進 | MEMSの集積・融合の進展と新産業創出への期待 | 第7回MEMS講習会「MEMSの設計・加工技術と応用例」（中・上級者向け）、(財)マイクロマシンセンターファンドリーサービス産業委員会、アルカディア市ヶ谷（東京・私学会館）、2006年7月10日 (2006.7). |
| 7 | その他 (講演) | 杉山 進 | MEMS・集積化の進展と新産業創出への期待 | 2006年（平成18年）秋季 第67回応用物理学会学術講演会付随、第39回応用物理学会スクール（2006年秋季）、滋賀、立命館大学、2006年8月30日 (2006.8). |
| 8 | その他 (招待 講演) |
杉山 進 | 「新産業創出のキーとなるMEMSテクノロジー」－MEMSの集積・融合化技術の進展－ | 経営講演会、(材)りそな中小企業振興財団、りそな銀行東京本社講堂、東京、平成18年11月17日 (2006.11). |