Year/Month |
Journal/proceedings |
Title |
Authors |
| 2005/6 |
Journal of Micromechanics and Microengineering |
The Fabrication and Test of a Square Prism Shaped Dye Micro Laser
Based on the SU-8 Molding Process |
Yigui Li, Jinquan Liu and Susumu Sugiyama |
| 2005/7 |
Journal of Micromechanics and Microengineering |
Design and Fabrication of a Miniaturized Six-Degree-of-Freedom
Piezoresistive Accelerometer |
Ranjith Amarasinghe, Dzung Viet Dao, Toshiyuki Toriyama and Susumu
Sugiyama |
| 2005/8 |
Journal of Micromechanics and Microengineering |
Fabrication of Flexible Thermopile Generator |
Koichi Itoigawa, Hiroshi Ueno, Masayoshi Shiozaki, Toshiyuki Toriyama
and Susumu Sugiyama |
| 2005/1 |
IEEE proceedings (MEMS 2005), The 18th IEEE Int'l Conference on
Micro Electro Mechanical Systems, Miami Beach, Florida, USA, Jan.30-Feb.3,
2005 |
Design and Fabricaton of Miniaturized Six-Degree
of Freedom Piezoresistive Accelerometer |
R.Amarasinghe, D.V.Dao, T.Toriyama and S.Sugiyama |
| 2005/1 |
IEEE proceedings (MEMS 2005), The 18th IEEE Int'l Conference on
Micro Electro Mechanical Systems, Miami Beach, Florida, USA, Jan.30-Feb.3,
2005 |
A Dual Axis Gas Gyroscope Utilizing Low-Doped Silicon Thermistor |
V.T.Dau, T.Shiozawa, D.V.Dao, H.Kumagai and S.Sugiyama |
| 2005/1 |
IEEE proceedings (MEMS 2005), The 18th IEEE Int'l Conference on
Micro Electro Mechanical Systems, Miami Beach, Florida, USA, Jan.30-Feb.3,
2005 |
Mechanical Characteristics of FIB Deposited Carbon Nanowire by Electrostatic
Actuated Nano Tensile Testing Devices (EANAT) |
Yoshitada Isono, Mario Kiuchi, Susumu Sugiyama, Takahiko Morita
and Sinji Matsui |
| 2005/8 |
IEEE proceedings (LEOS 2005) International Conference
on Optical MEMS and Their Applications, Aug. 1-4, 2005, Oulu, Finland |
Fabrication and Test of Square Prism Shaped Dye Micro Laser Based
on Photoresist Molding Process |
Yigui Li and Susumu Sugiyama |
| 2005/7 |
IEEE Proceedings (MHS 2005/Micro-Nano COE) Int'l Symposium on Micro-NanoMechatronics
and Human Science, Nagoya, Nov.7-9, 2005 |
A Si Micro Conveyer System Based on Electrostatic Comb-Drive Actuators |
Phuc Hong Pham, Dzung Viet Dao, Satoshi Amaya, Ryoji Kitada, Li
Shipeng and Susumu Sugiyama |
| 2005/7 |
IEEE Proceedings (MHS 2005/Micro-Nano COE) Int'l Symposium on Micro-NanoMechatronics
and Human Science, Nagoya, Nov.7-9, 2005 |
Optimizatin and Characterizations of the Dual Axis Gas Gyroscope |
Dzung Viet Dao, Van Thanh Dau, Tatsuo Shiozawa, Hideo Kumagai and
Susumu Sugiyama |
| 2005/12 |
SPIE proceedings (SPIE MMN'05) Int'l Symposium, Microelectronics,
MEMS, and Nanotechnology, 11-15 Dec. 2005, Brisbane, Australia |
Portable Blood Extraction Device Integrated with Biomedical Monitoring
System |
S.Khumpuang, M.Horade, K.Fujioka and S.Sugiyama |
| 2005/12 |
SPIE proceedings (SPIE MMN'05) Int'l Symposium, Microelectronics,
MEMS, and Nanotechnology, 11-15 Dec. 2005, Brisbane, Australia |
Development of Micromotion Sensors Based on Piezoresistive and Thermo-Resistive
Effects in Silicon |
D.V.Dao, V.T.Dau, T.Shiozawa, H.Kumagai and S.Sugiyama |
| 2005/12 |
SPIE proceedings (SPIE MMN'05) Int'l Symposium, Microelectronics,
MEMS, and Nanotechnology, 11-15 Dec. 2005, Brisbane, Australia |
Flexible Bi2Te2.5Se0.5 and Bi0.5Sb1.5Te3 Thermopile Generator |
M.Shiozaki, S.Sugiyama, N.Watanabe, H.Ueno and K.Itoigawa |
| 2005/12 |
SPIE proceedings (SPIE MMN'05) Int'l Symposium, Microelectronics,
MEMS, and Nanotechnology, 11-15 Dec. 2005, Brisbane, Australia |
Development of Fabrication Process for Shape Control of Three-Dimensional
Submicron Structure by Synchrotron Radiaton Lithography |
S.Fujinawa, F.Kato and S.Sugiyama |
| 2005/12 |
SPIE proceedings (SPIE MMN'05) Int'l Symposium, Microelectronics,
MEMS, and Nanotechnology, 11-15 Dec. 2005, Brisbane, Australia |
Advanced Simulation for Shape-Prediction of Microstructures Fabricated
by PCT Technique |
M.Horade, S.Khumpuang, K.Fujioka and S.Sugiyama |
| 2005/12 |
SPIE proceedings (SPIE MMN'05) Int'l Symposium, Microelectronics,
MEMS, and Nanotechnology, 11-15 Dec. 2005, Brisbane, Australia |
Fabrication of Submicron Three-Dimensional Structure by Plane-Pattern
to the Cross-Section Transfer Method Using Synchrotron Radiation Lithography |
F.Kato, S.Fujinawa and S.Sugiyama |
| 2005/10 |
Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines,
and Applied Systems, Oct.20-21, 2005, Tokyo |
Geometrical Optimization of LIGA Microneedles for Blood Extraction |
S.Khumpuang, M.Horade, K.Fujioka and S.Sugiyama |
| 2005/10 |
Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines,
and Applied Systems, Oct.20-21, 2005, Tokyo |
Fabrication of Self-Organization Alumina X-ray Lithography Mask
for Sub-wavelength Nanometer Grating |
Ling-Han Li, Takeshi Hashishin, Yigui Li and Susumu
Sugiyama |
| 2005/10 |
Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines,
and Applied Systems, Oct.20-21, 2005, Tokyo |
Transcriptome Analyzing Chip Based on Liquid-Phase Detection Using
Fluorescence Labeled Nucleic Acid Probe |
S.Tamaoki, S.Sugiyama, T.Sakamoto and A.Murakami |
| 2005/10 |
Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines,
and Applied Systems, Oct.20-21, 2005, Tokyo |
Fabrication of Diaphragm Actuator Using Bulk PZT |
T.Konishi, M.Ide, K.Tanaka and S.Sugiyama |
| 2005/10 |
Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines,
and Applied Systems, Oct.20-21, 2005, Tokyo |
Mirror Deformation by Piezoelectric Actuators |
Fuminori Tanaka, Shigeo Maeda, Kenji Nagashima, Yoshiki Tsuchiya,
Katsuhiko Tanaka, Akira Ishii and Susumu Sugiyama |
| 2005/10 |
Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines,
and Applied Systems, Oct.20-21, 2005, Tokyo |
Design and Fabrication of Polymer Electrostatic Comb-Drive Actuators
and Application in Micro Conveyer Systems |
Phuc Hong Pham, Dzung Viet Dao, Satoshi Amaya, Ryoji Kitada, Li
YiGui and Susumu Sugiyama |
| 2005/10 |
Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines,
and Applied Systems, Oct.20-21, 2005, Tokyo |
Design of Micro Force-Moment Sensors and Application to Soft Fingertip
Sensor |
Y.Sei, D.V.Dzung, T.Saiki and S.Sugiyama |
| 2005/10 |
Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines,
and Applied Systems, Oct.20-21, 2005, Tokyo |
Application of Collective Synchronization to Sensor Data Processing |
Yuhei Abe, Takaya Miyano and Susumu Sugiyama |
| 2005/10 |
Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines,
and Applied Systems, Oct.20-21, 2005, Tokyo |
Fabrication of Submicron 3D-Structure by Plane-patern to the Cross-section
Transfer (PCT) Technique Using Synchrotron Radiation Lithography |
F.Kato, S.Fujinawa and S.Sugiyama |
| 2005/10 |
Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines,
and Applied Systems, Oct.20-21, 2005, Tokyo |
Fabrication of an Ultra Small Accelerometer Utilizing Si Nanowire
Piezoresistors |
Akira Okamura, Dzung Viet Dao, Toshiyuki Toriyama
and Susumu Sugiyama |
| 2005/10 |
Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines,
and Applied Systems, Oct.20-21, 2005, Tokyo |
A Useful Study for Development of 3-D Microfabrication Method by
SR Lithography |
M.Horade, S.Khumpuang, K.Fujioka, Y.Li and S.Sugiyama |
| 2005/10 |
Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines,
and Applied Systems, Oct.20-21, 2005, Tokyo |
Dual Axis Accelorometer Utilizing Low Doped Silicon Thermistor |
Masahiro Hayashida, Van Thanh Dau, Dzung Viet Dao,
Dinh Thien Xuan and Susumu Sugiyama |