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研究業績

論文

2018年

  • 安藤妙子, 鳥山寿之
    結晶方位分布関数による結晶集合組織のピエゾ抵抗表記
    電気学会論文誌E(センサ・マイクロマシン部門誌), vol. 138, no. 5, pp.214-219 (2018) 10.1541/ieejsmas.138.214
  • 永田一志, 樊利文, 武田朋之, 服部佐知子, 青柳誠司, 鈴木昌人, 才木常正, 瀧澤由佳子, 安藤妙子, 杉山進
    高解像三次元プリンタによる超狭ピッチバンプアレイ用プローブ
    エレクトロニクス実装学会誌, vol. 21, no. 6, pp.586-588 (2018)
  • Taeko Ando and Toshiyuki Toriyama
    Description of New Piezoresistance Tensor Equation for a Cubic Single Crystal and Its Application to Multiaxial Stress
    Sensors and Materials, vol. 30, no. 9, pp. 2101-2124 (2018) 10.18494/SAM.2018.1960
  • Taeko Ando and Toshiyuki Toriyama
    Role of preferential crystallographic orientation in piezoresistance anisotropy for cubic polycrystalline aggregates
    Sensors and Materials, vol. 30, no. 9, pp. 2125-2142 (2018) 10.18494/SAM.2018.1959

2016年

  • Taeko Ando, Mitsuhiro Shikida, and Kazuo Sato
    Effect of Temperature and Humidity on Degradation of Single-Crystal Silicon Microbeam in MEMS Resonator
    Sensors and Materials, vol. 28, no. 2, pp. 113-120 (2016) 10.18494/SAM.2016.1161

2015年

  • 柴田駿, 天谷諭, 杉山進, 安藤妙子
    静電容量型振動子を用いたPMMAの疲労試験
    電気学会論文誌E(センサ・マイクロマシン部門誌), vol. 135, no. 7, pp.257-262 (2015) 10.1541/ieejsmas.135.257

2014年

  • Yasuyuki Koide, Daisuke Teramoto, Satoshi Konishi, and Taeko Ando
    Fabrication of Convex Si Microstructures for Hot Embossing of Microfluidic Channels with 45° Mirror
    Japanese Journal of Applied Physics, 53, 6, 06JM13, (2014)

2013年

  • T. A. Phan, H. Oguchi, M. Hara, M. Shikida, H. Hida, T. Ando, K. Sato, and H. Kuwano
    Fe-B-Nd-Nb metallic glass thin films for microelectromechanical systems
    Applied Physics Letters, 103, 181901 (2013)

2008年以前

  • S. Nakao, T. Ando, M. Shikida, and K. Sato
    Effect of temperature on fracture toughness in a single-crystal-silicon film and transition in its fracture mode
    Journal of Micromechanics and Microengineering, vol. 18, no. 1, article numver: 015026 (2008)
  • X. Li, T. Kasai, S. Nakao, T. Ando, M. Shikida, and K. Sato
    Influence of sub-micrometer notches on the fracture of single crystal silicon thin films
    Fatigue & Fracture of Engineering Materials & Structures, vol.30, no.12, pp.1172-1181 (2007)
  • X. Li, G. Ding, T. Ando, M. Shikida, and K. Sato
    Micromechanical characterization of electroplated permalloy films for MEMS
    Microsystem Technologies, vol. 14, no. 2, pp.131-134 (2007)
  • S. Nakao, T. Ando, M. Shikida, and K. Sato
    Mechanical properties of a micron-sized SCS film in a high-temperature environment
    Journal of Micromechanics and Microengineering, vol. 16, no. 4, pp.715-720 (2006)
  • T. Tsuchiya, M. Hirata, N. Chiba, R. Udo, Y. Yoshitomi, T. Ando, K. Sato, K. Takashima, Y. Higo, Y. Saotome, H. Ogawa, and K. Ozaki
    Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films
    Journal of Microelectromechanical Systems, vol. 14 -5, pp. 1178-1186 (2005)
  • T. Ando, X. Li, S. Nakao, T. Kasai, M. Shikida, and K. Sato
    Fracture toughness measurement of thin-film silicon
    Fatigue & Fracture of Engineering Materials & Structures, vol.28, no.8, pp.687-694 (2005)
  • T. Ando, X. Li, S. Nakao, T. Kasai, M. Shikida, and K. Sato
    Anisotropy of Fracture Strength and Fracture Toughness of Micro-sized Single-crystal Silicon
    The Transactions of The Institute of Electrical Engineers of Japan, vol. 125-E, no. 7, pp. 307-312 (2005)
  • X. Li, T. Kasai, S. Nakao, H. Tanaka, T. Ando, M. Shikida, and K. Sato
    Measurement for fracture toughness of single crystal silicon film with tensile test 
    Sensors and Actuators A: Physical, vol. 119, no. 1, pp. 229-235 (2005)
  • X. Li, T. Kasai, S. Nakao, T. Ando, M. Shikida, K. Sato, and H. Tanaka
    Anisotropy in fracture of single crystal silicon film characterized under uniaxial tensile condition
    Sensors and Actuators A: Physical, vol. 117, no. 1, pp. 143-150 (2005)
  • M. Shikida, M. Ando, Y. Ishihara, T. Ando, K. Sato, and K. Asaumi
    Non-photolithographic pattern transfer for fabricating pen-shaped microneedle structures
    Journal of Micromechanics and Microengineering, vol. 14, no. 11, pp.1462-1467 (2004)
  • M. Shikida, M. Odagaki, N. Todoroki, M. Ando, Y. Ishihara, T. Ando, and K. Sato
    Non-photolithographic pattern transfer for fabricating arrayed three-dimensional microstructures by chemical anisotropic etching
    Sensors and Actuators A: Physical, vol. 116, no. 2, pp. 264-271 (2004)
  • 松室昭仁, 粥川君治, 藤本洋平, 安藤妙子, 佐藤一雄
    原子分解能を有する応力負荷下でのその場表面観察システムの開発
    日本機械学会論文集 (A編), vol. 69, no. 678, pp. 330-337 (2003)
  • T. Ando, M. Shikida, K. Sato
    Tensile-mode fatigue testing of silicon films as structural materials for MEMS
    Sensors and Actuators A: Physical, vol. 93, no. 1, pp. 70-75 (2001)
  • 安藤妙子, 吉岡テツヲ, 式田光宏, 佐藤一雄
    薄膜材料を対象とするオンチップ引張疲労試験システムの開発
    精密工学会誌, vol. 66, no. 12, pp. 1890-1894 (2000)
  • T. Yoshioka, T. Ando, M. Shikida, and K. Sato
    Tensile testing of SiO2 and Si3N4 films carried out on a silicon chip
    Sensors and Actuators A: Physical, vol. 82, no. 1-3, pp. 291-296 (2001)
  • 吉岡テツヲ, 安藤妙子, 式田光宏, 佐藤一雄
    薄膜材料のオンチップ引張試験法の提案と試験デバイスの製作
    日本機械学会論文集 (C編), vol. 65, no. 635, pp. 2973-2978 (1999)
  • 安藤妙子, 吉岡テツヲ, 式田光宏, 佐藤一雄, 川端達央
    オンチップ引張試験によるシリコン薄膜の応力とひずみの測定
    電気学会論文誌E, vol. 119, no. 2, pp. 67-72 (1999)
  • K. Sato, T. Yoshioka, T. Ando, M. Shikida, and T. Kawabata
    Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip
    Sensors and Actuators A: Physical, vol. 70, no. 1-2, pp. 148-152 (1998)

国際会議発表(2009年以降)

2016年

  • T. Ando and T. Toriyama
    Piezoresistive Rosette Gauge Taking into Account of Silicon Cubic Crystal Anisotropy
    Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT2016), (Kanazawa, Jun. 26-29, 2016)
  • T. Ando, K. Ueno, and M. Nakajima
    Compliant MEMS Structure for Observation of Fixed Point under Tensile Deformation
    The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), (Matsushima, Apr. 17-20, 2016)

2015年

  • S. Sugiyama, T. Ando, S. Amaya
    Investigation of Material Mechanical Properties Used for Polymer MEMS
    The 5th International Workshop on Nanotechnology and Application (IWNA 2015), (Vung Tau, Vietnam, Nov. 11-14, 2015)
  • K. Ueno and T. Ando
    Effect of Temperature and Loading Rate on Plastic Deformation of Single Crystal Si
    28th International Microprocesses and Nanotechnology Conference (MNC2015), 12P-7-102, (Toyama, Nov. 10-13, 2015)

2014年

  • S. Shibata, S. Amaya, S. Sugiyama, and T. Ando
    Fatigue Phenomenon of PMMA Under Cyclic Stress Using Electrostatic Com-Drive Actuator
    27th International Microprocesses and Nanotechnology Conference (MNC2014), 6C-5-3, (Fukuoka, Nov. 4-7, 2014)
  • K.Tani and T. Ando
    Fabrication of MEMS Chamber for SEM Observation Under Controlled Temperature Condition
    27th International Microprocesses and Nanotechnology Conference (MNC2014), 6P-7-94, (Fukuoka, Nov. 4-7, 2014)
  • S. Sugiyama, S. Shibata, S. Amaya, and T. Ando
    Application of Polymer MEMS to Material Fatigue Testing
    The 2nd International Conference on Advanced Materials and Nanotechnology, (Hanoi, Oct. 29-Nov. 1, 2014)
  • S. Shibata, S. Amaya, S. Sugiyama, and T. Ando
    Fatigue Testing of PMMA Using Polymer MEMS Actuator Fabricated by Hot Embossing
    7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014), 14-1, (Daegu, Jun. 29-Jul. 2, 2014)

2013年

  • Yasuyuki Koide, Daisuke Teramoto, Satoshi Konishi, and Taeko Ando
    Fabrication of convex Si microstructures with 45° mirror plane for application of microfluidic channels
    MNC 2013, 26th International Microprocesses and Nanotechnology Conference, 8P-11-110, (2013.11.5-8, 札幌)
  • T. A. Phan, H. Oguchi, M. Hara, M. Shikida, H. Hida, T. Ando, K. Sato, and H. Kuwano
    A new metallic glass Fe-B-Nd-Nb thin film material for micro sensors and actuators: fabrication and characterization
    Tech. Dig. of The 17th International Conference on Solid-State Sensors, Actuators and Microsystems  (Transducers ’13) pp. 1040-1043, (Barcelona, Jun. 16-20, 2013)
  • T. Shirata, T. Sato, and T. Ando
    Dependence of mechanical on position in silicon ingot by evaluating B and Ge codoped silicon
    Tech. Dig. of The 17th International Conference on Solid-State Sensors, Actuators and Microsystems  (Transducers ’13) pp. 1055-1058, (Barcelona, Jun. 16-20, 2013)

2011年

  • T. Ando, T. Takumi, and Kazuo Sato
    Fracture Toughness of  Si Thin Film at Very Low Temperatures by Tensile Test
    Proc. of IEEE MEMS 2011, pp.436-439, (Cancun, Mexico, Jan. 24-27, 2011)
  • S. Kamiya, T. Tsuchiya, T. Ikehara, K. Sato, T. Ando, T. Namazu, and K. Takashima
    Cross comparison of fatigue lifetime testing on silicon thin film specimens
    Proc. of IEEE MEMS 2011, pp.436-439, (Cancun, Mexico, Jan. 24-27, 2011)

2009年

  • T. Naito, A. Yatsuhashi, N. Kaji, T. Ando, K. Sato, H. Moriya, H. Kitano, Y. Okamoto, M. Tokeshi, and Y. Baba
    On-chip real-time PCR for genetic Tug-of-War (g-TOW) experiment
    Proceedings of MicroTAS 2009 conference, pp. 627-629, (Jeju, Korea, Nov. 1-5, 2009)
  • T. Ando, T. Takumi, and Kazuo Sato
    Degradation of mechanical strength at Si/SiO2 interface on SOI wafers under cyclic loading
    Proc. of IEEE MEMS 2009, pp.665-669, (Sorento, Jan. 25-29, 2009)