Micro-photoforming

To fabricate 3-D microstructures, photoforming is applied. However, the presently proposed photoforming apparatus is large and requires a special laser beam (ultra-short-pulsed near-infrared Ti:sapphire) or special resin (two-photon-absorbed urethane material) We developed a desktop micro-photoforming apparatus using a DVD optical head and a visible light-curable resin (DF-200N, Nippon Kayaku Corp.), both of which are commercially available . Since the microstructure is generated by scanning a focused laser beam to solidify the contour of a liquid photopolymer, the resolution is determined by the laser beam intensity distribution and the absorption of light within the polymer. To decrease the solidified depth, a thin resin film was made using a spinner, as shown in Fig. 1

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Fig. 1.
Schematic diagram (a), and photograph (b) of the spinner-type micro-photoforming apparatus

Figure 2 shows the shuttlecock optical rotor with a 30 mm diameter and 15 mm thickness. The fabrication conditions were a scan speed of 25 mm/s, scan pitch of 0.3 mm, single scan and a laser power of 0.35 mW. The overall time was 12 minutes to fabricate 16 rotors.


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Fig.2. Shuttlecock optical rotors, 30 mm diameter and 15 mm thick, fabricated by photoforming

テキスト ボックス: Optical power	0.35 mW
Scanning velocity
Scanning pitch
Scanning method	25 ? 70 mm/s
0.3 mm
Single scan
Layer thickness	5 mm
Resin	Visible light-curable resin* 
Resin amount	360 ml
* DF-200N, Nippon Kayaku Corp.
Table 1.
Photoforming conditions for the slope of the rotor



 

Complicated 3-D microstructures were fabricated by stacking thin resin layers that had been solidified into the cross-sectional shape using a DVD LD with the wavelength of 650 nm. Table 1 shows the photoforming conditions for the slope of the rotor. Figure 3 shows the 3-D design (upper), cross sections (middle) and fabricated layers (lower) of 5 mm thick each. It is found that the fabricated layer shapes are similar to those of the corresponding cross sections.

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Fig.3. Microstructures with slopes are fabricated by stacking of thin resin layers having the 2-D cross-sectional shape, upper: 3-D designed shape, middle: 2-D cross sections designed, and lower: fabricated 2-D cross-sectional-shape layers of 5 mm thick each