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発表・論文 論文 1) S. Kamide and K. Suzuki, “Laterally-Driven Silicon RF
Micro-Switch with High Isolation,“ Japanese Journal of Applied Physics, Vol.
45, No. 6B, pp.5637-5641, 2006. 2) H. Tauchi and K. Suzuki, “Two-Stage-Driven
Cantilever-Based RF Micro-Electro-Mechanical System Microswitch,” Japanese
Journal of Applied Physics, Vol. 45, No. 6B, pp.5642-5645, 2006. 3) S. Kamide and K. Suzuki, “Design and Fabrication of a Laterally-Driven
RF Micro-Switch with High Isolation,“ IEEJ Transactions on Sensors and
Micromachines, Vol. 126, No. 8, pp.453-456, Aug. 2006.. 4) H. Tauchi and K. Suzuki, “Design and Fabrication
of Two-Stage-Driven Cantilever-Based RF MEMS Micro-Switch,” IEEJ Transactions
on Sensors and Micromachines, Vol. 126, No. 7, pp.352-355, July, 2006. 5) M. Okada, H. Nagasaki, A. Tamano, K. Niki, H. Tanigawa, and K. Suzuki,
“Silicon Beam Resonator Utilizing the Third Bending Mode,” Japanese Journal of
Applied Physics, Vol. 48, No.6, pp. 06FK03: 1-8, 2009. 6) T. Ishino, 7) H. Tanigawa, S. Makita, and K. Suzuki, “Silicon Fishbone-Shaped MEMS
Resonator with Digitally Variable Resonant-Frequency Tuning,” IEEJ Transactions on
Electrical and Electronic Engineering, Vol. 5, No. 2, pp. 164-170, 2010. 8) H. Ado, T. Furutsuka, and K. Suzuki, “2.5 GHz Low Insertion Loss MEMS
Hybrid Phase Shifters Using Micro-Electro-Mechanical Switches,” Japanese
Journal of Applied Physics, Vo. 49, pp. 06GN18: 1-5, 2010. 9) T. Oka, H. Tanigawa, and K. Suzuki, “Characterization on
Four-Points-Pinned Ring-Shaped Silicon Microelectromechanical Systems
Resonator,” Japanese Journal of Applied Physics, Vo. 49, pp. 06GN05: 1-8, 2010. 10) K. Suzuki, H. Ado, K. Yagi, T. Furutsuka, and K. Suzuki, “Study on a
Phased-Array Antenna with MEMS Switches,” IEEJ Transactions on Sensors and
Micromachines, Vol. 130, No. 11, pp.537-542, Nov. 2010. 11) K. Ishida, K. Kitamura, T. Furutsuka, and K. Suzuki, “Equivalent RF
Circuit Model on Fluid MEMS Capacitors,” IEEJ Transactions on Sensors and
Micromachines, Vol. 131, No. 1, pp.35-39, Jan. 2011. 国際会議 1) S. Kamide and K. Suzuki, “Laterally-Driven RF Micro-Switch with High
Isolation,“ Digest of 2005 International Microprocesses and Nanotechnology
Conference, 2) H. Tauchi and K. Suzuki, “Two-Stage-Driven Cantilever-Based RF MEMS
Micro-Switch,” Digest of 2005 International Microprocesses and Nanotechnology
Conference, 3) N. Nomoto and K. Suzuki, “Two-Step-Driven RF-MEMS Switch with Spiral Springs,“
Digest of 2006 International Microprocesses and Nanotechnology Conference, 4) Y. Okumura, Y. Takita, and K. Suzuki, “MEMS RF Switch with Fast
Switching Speed,“ Digest of 2006 International Microprocesses and Nanotechnology Conference,
5) M. Nishiyama, H. Konishi, J. Suzuki, Y. Tezuka, Y. Suzuki, and K.
Suzuki, “Extremely High Capacitance Ratio (C/R) RF MEMS Variable Capacitor with
Chameleon Actuators,” Dig. of The 14th Int. Conf. on Solid-State Sensors,
Actuators and Microsystems, 6) H. Konishi, M. Nishiyama, J. Suzuki, Y. Tezuka, A. Komai, Y. Suzuki,
and K. Suzuki, “Built-in Upwards-Bending Electrostatic Actuator of
Three-Level-Structural Variable Capacitor,” Dig. of The 14th Int. Conf. on
Solid-State Sensors, Actuators and Microsystems, 7) S. Makita, H. Tanigawa, and K. Suzuki, “Silicon Fishbone-Shaped
Resonant-Frequency-Tunbale MEMS Resonator,“ Digest of 2007
International Microprocesses and Nanotechnology Conference, Kyoto, The Japan
Society of Applied Physics, pp.500-501, Nov. 2007. 8) K. Maeda and K. Suzuki, “Design of Low-Driving-Voltage Ingegrated MEMS
Switch with Sticking Suppression,“ Digest of 2007 International Microprocesses
and Nanotechnology Conference, Kyoto, The Japan Society of Applied Physics, pp.524-525,
Nov. 2007. 9) M. Okada, H. Nagasaki, A. Tamano, K. Niki, H. Tanigawa, and K. Suzuki, “Silicon
Beam Resonator Utilizing the Third Bending Mode,” Digest of 2008 International
Microprocesses and Nanotechnology Conference, Fukuoka, The Japan Society of
Applied Physics, pp.518-519, Oct. 2008. 10) H. Ado, T. Furutsuka, and K. Suzuki, “2.5 GHz Low Insertion Loss MEMS
Hybrid Phase Shifters,” Digest of 2009 International Microprocesses and
Nanotechnology Conference, Sapporo, The Japan Society of Applied Physics, pp.748-749,
2009. 11) T. Oka, H. Tanigawa, and K. Suzuki, “Characterization on
Four-Points-Pinned Ring-Shaped Silicon MEMS Resonator,” Digest of 2009
International Microprocesses and Nanotechnology Conference, Sapporo, The Japan
Society of Applied Physics, pp.112-113, 2009. 12) M. Kiso, M. Okada, A. Tamano, H. Fujiura, H. Miyauchi, K. Niki, H.
Tanigawa, and K. Suzuki, “MEMS Resonator Utilizing Torsional-to-Transverse
Vibration Conversion,” Digest of 2010 International Microprocesses and
Nanotechnology Conference, Kokura, The 13) T. Oka, T. Ishino, H. Tanigawa, and K. Suzuki, “A Silicon Beam MEMS
Resonator with a Sliding Electrode,” Digest of 2010 International
Microprocesses and Nanotechnology Conference, Kokura, The 14) Z. Jin, M. Hirata, and K. Suzuki, “Highly-Sensitive Rigidly-Coupled
Hexagonal Gyroscope,” Digest of 2010 International Microprocesses and
Nanotechnology Conference, Kokura, The 国内会議発表 1) S. Kamide and K. Suzuki, “Design and Fabrication of a Laterally-Driven
RF Micro-Switch with High Isolation,“ Proceedings of the
22nd Sensor Symposium, 2) H. Tauchi and K. Suzuki, “Design and Fabrication ofTwo-Stage-Driven
Cantilever-Based RF MEMS Micro-Switch,” Proceedings of the 22nd Sensor
Symposium, 3) N. Nomoto and K. Suzuki, “Design and Fabrication of a Two-Step-Driven
RF-MEMS Switch with Spiral Springs,“ Proceedings of the 23rd Sensor Symposium,
Takamatsu, The Institute of Electrical Engineers of Japan, pp.78-81, Oct. 2006. 4) Y. Okumura, Y. Takita, and K. Suzuki, “Design
and Fabrication of a MEMS RF Switch with Fast Switching Speed,“ Proceedings of the
23rd Sensor Symposium, 5) T. Ishino, S. Makita, H. Tanigawa, and K.
Suzuki, “Characteristics of Three-Dimensional Resonant Vibration in a MEMS Silicon
Beam Resonator,” Proceedings of the 25th Sensor Symposium, 6) K. Suzuki, H. Ado, K. Yagi, T. Furutsuka, and
K. Suzuki, “Study on a Phased-Array Antenna with MEMS Switches,” Proceedings of
the 26th Sensor Symposium, Tokyo, The Institute of Electrical Engineers of
Japan, pp.107-110, Oct. 2009. 7) K. Fukuda, K. Kitamura, R. Kanda, H.
Tanigawa, and K. Suzuki, “Low-Pass Filter with Fluid MEMS Variable Capacitor,”
Proceedings of the 26th Sensor Symposium, Tokyo, The Institute of Electrical
Engineers of Japan, pp.111-115, Oct. 2009. 8) K. Hashimoto, K. Ito, H. Tanigawa, and K.
Suzuki, “10 MHz MEMS Resonator Utilizing a Narrow Gap Process,” Proceedings of
the 26th Sensor Symposium, Tokyo, The Institute of Electrical Engineers of
Japan, pp.116-119, Oct. 2009. 9) S. Yamamoto, K. Maeda, and K. Suzuki, “Influence of Contact Resistance
for a Shunt-Type MEMS Resistive Switch,” Proceedings of the 26th Sensor
Symposium, Tokyo, The Institute of Electrical Engineers of Japan, pp.130-135,
Oct. 2009. 10) K. Ishida, K. Kitamura, T. Furutsuka, and K.
Suzuki, “Equivalent RF Circuit Model on Fluid MEMS Capacitors,” Proceedings of
the 26th Sensor Symposium, Tokyo, The Institute of Electrical Engineers of
Japan, pp.226-229, Oct. 2009. 11) T. Ishino, H. Tanigawa, and K. Suzuki, “Suppression
of out-of-plane vibration for a Silicon MEMS Resonator,” Proceedings of the
26th Sensor Symposium, 12)
鈴木健一郎：「RF-MEMS技術と集積化RF回路技術」、異種機能集積化シンポジウム（秋季 第71回応用物理学会学術講演会）、 13) T. Shigeno, T. Furutsuka, and K. Suzuki, “Development of Si-based
Coplanar Wave-guides with Via Holes for 30 GHz Applications,” Proceedings of
the 27th Sensor Symposium, Matsue, The Institute of Electrical Engineers of
Japan, pp.678-682, Oct. 2010. 14) S. Yamamoto, K. Maeda, and K. Suzuki, “Integrated MEMS Switch with a
Submicron Narrow Gap,” Proceedings of the 27th Sensor Symposium, 15) T. Yamanaka, 16) K. Ishida, T. Furutsuka, and K. Suzuki, “Drift of Electrical
Characteristics over Time for Fluid MEMS Capacitors,” Proceedings of the 27th
Sensor Symposium, Matsue, The Institute of Electrical Engineers of Japan, pp.260-264,
Oct. 2010. 17) N. Suzuki, H. Tanigawa, and K. Suzuki, “Optimization
for High Q-Factor in Fishbone-Shaped MEMS Resonators,” Proceedings of the 27th
Sensor Symposium, Matsue, The Institute of Electrical Engineers of Japan, pp.282-286,
Oct. 2010. 18) Y. Miyake, 19) T. Muramatsu, M. Hirata, and K. Suzuki, “Evaluation
of Dynamic Characteristics for the Detection Mechanics in Vibratory MEMS
Gyrosensors,” Proceedings of the 27th Sensor Symposium, Matsue, The Institute
of Electrical Engineers of Japan, pp.582-586, Oct. 2010.
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