( Engineering Experiment Labo. 2 )

ＥＢ LITHO. LAB.

LAYOUT of ＥＢ Litho.Lab. & Photo Litho.Lab.

Pattern with the size in nano order can be formed by using electron beam writer. 
Data from CAD-workstation are directly linked to EB writer for fabrication of photomask
and X-ray mask.