PUBLISHED PAPERS & PRESENTATIONS BY SUGIYAMA LAB.
<Apr. 2003 - Mar. 2004>
(last modified : Mar. 9, 2004)
No. | PRESEN- TATION |
AUTHOR / COAUTHOR | TITLE | JOURNAL & PUBLISHER / CONFERENCE NAME |
1 | PAPER | Dzung Viet Dao, Toshiyuki Toriyama, John Wells and Susumu Sugiyama | Silicon Piezoresistive Six-Degree of Freedom Force-Moment Micro Sensor | Sensors and Materials, MYU, Tokyo, Vol. 15, No. 3, pp.113-135 (2003.5) |
2 | PAPER | N. Miyano, H. Iwasa, K. Isonishi, K. Ameyama and S. Sugiyama | Fabrication of Nano-Grained TiC/Ti5Si3 Micro-Molds by the LIGA-MA Process | Memoirs of the SR Center, Ritsumeikan University, No. 5, April 2003, pp.9-16 (2003.4) |
3 | PAPER | Naoki Miyano, Kazunori Tagaya, Kazunori Kawase, Kei Ameyama and Susumu Sugiyama | Application of MA-SPS Method for Fabrication of Microstructures Using LIGA Process | 材料、日本材料学会、第52巻、第7号、pp.783-788 (2003.7) |
4 | PAPER | Naoki Miyano, Susumu Sugiyama and Kei Ameyama | 放電プラズマ焼結法を利用した金属間化合物系材料の製造 | Materials Science and Technology, Materials Science Society of Japan, Vol.40, No.4, pp.24-28 (2003.8) |
5 | PAPER | Susumu Sugiyama and Toshiyuki Toriyama | Design of a Micro Reciprocating Engine for Power Generation | IEEJ Transactions on Sensors and Micromachines, Vol.123, No.9, 2003, The Institute of Electrical Engineers of Japan, pp.351-356 (2003.9) |
6 | PAPER | T. Toriyama and S. Sugiyama | Single Crystal Silicon Piezoresistive Nano-Wire Bridge | Sensors and Actuators A Physical, Vol.108 (2003), Elsevier, pp.244-249 (2003) |
7 | PAPER | Naoki Miyano, Kazunori Tagaya, Kazunori Kawase, Kei Ameyama and Susumu Sugiyama | Fabrication of Alloy and Ceramic Microstructures by LIGA-MA-SPS Process | Sensors and Actuators A Physical, Vol.108 (2003), Elsevier, pp.250-257 (2003) |
8 | PAPER | N. Miyano, H. Iwasa, K. Isonishi, S. Tanaka, S. Sugiyama and K. Ameyama | Application of Pseud-superplasticity to Produce TiN/Ti5Si3 and TiC/Ti5Si3 Nano Grain Composites for Micro Molding | Materials Science Forum, Vols.447-448, pp.311-316 (2004) |
PAPER | (to be in press) | |||
PAPER | ||||
1 | INTERNATIONAL CONFERENCE | N. Miyano, H. Iwasa, K. Isonishi, K. Ameyama and S. Sugiyama | Fabrication of Nano-Grained TiC/Ti5Si3 Micro-Molds by the LIGA-MA Process | (IPMM-2003) The 4th Int'l Conference on Intelligent Processing and Manufacturing of Materials, May 18-23, 2003, Sendai, Japan (2003.5) |
2 | INTERNATIONAL CONFERENCE | Toshiyuki Toriyama and Susumu Sugiyama | Piezoresistance Analysis of n-type 6H-SiC for High-Temperature Mechanical Sensors | (Transducers'03)The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, IEEE (2003.6) |
3 | INTERNATIONAL CONFERENCE | Dzung Viet Dao, Toshiyuki Toriyama, John Wells and Susumu Sugiyama | A MEMS-Based Microsensor to Measure All Six Components of Force and Moment on a Near-Wall Particle in Turbulent Flow | (Transducers'03)The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, IEEE (2003.6) |
4 | INTERNATIONAL CONFERENCE | Y. Isono, J. Tada, T. Watanabe, T. Unno, S Sugiyama and T. Toriyama | Elevated Temperature Tensile/Creep Test of UV-LIGA Nickel Thin Fillm for Design of High-Density Micro Cennector | (Transducers'03)The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, IEEE (2003.6) |
5 | INTERNATIONAL CONFERENCE | Toshiyuki Toriyama, Kenji Hashimoto and Susumu Sugiyama | Design and Fabrication of a Resonant Micro Reciprocating Engine for Power Generation | (Transducers'03)The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, IEEE (2003.6) |
6 | INTERNATIONAL CONFERENCE | Naoki Miyano, Hiroshi Iwasa, Michito Matsumoto, Kei Ameyama and Susumu Sugiyama | Application of LIGA-MA Process to Metal/Ceramics Nano-Composite Microstructure | (HARMST 2003) High Aspect Ratio Micro-Structure Technology Workshop, Jun. 15-17, 2003, California, USA (2003.6) |
7 | INTERNATIONAL CONFERENCE | Naoki Miyano, Hiroshi Iwasa, Michito Matsumoto, Kei Ameyama and Susumu Sugiyama | Application of LIGA-MA Process to Metal/Ceramics Nano-Composite Microstructure | MRS-J, Yokohama, October (2003.10) |
8 | INTERNATIONAL CONFERENCE | S.Khumpuang, R.Maeda and S.Sugiyama | Design and Fabrication of a Coupled Microneedle Array and Insertion Guide Array for Safe Penetration through Skin | IEEE (MHS2003) Proceedings of the 2003 International Symposium on Micromechatronics and Human Science, Nagoya, Oct.19-22, 2003, pp.233-237 (2003.10) |
9 | INTERNATIONAL CONFERENCE | S.Hasebe, J.Ogawa, T.Toriyama, S.Sugiyama, H.Ueno and K.Itoigawa | <IEEE Best Paper
Award in MHS2003> |
IEEE (MHS2003) Proceedings of the 2003 International Symposium on Micromechatronics and Human Science, Nagoya, Oct.19-22, 2003, pp.287-291 (2003.10) |
10 | INTERNATIONAL CONFERENCE | K.Hashimoto, J.Ogawa, T.Toriyama and S.Sugiyama | Design and Fabrication of a Resonant Micro Reciprocating Engine for Power Generation | IEEE (MHS2003) Proceedings of the 2003 International Symposium on Micromechatronics and Human Science, Nagoya, Oct.19-22, 2003, pp.293-297 (2003.10) |
11 | INTERNATIONAL CONFERENCE | Susumu Sugiyama | MEMS (Micro Electro Mechanical Systems) - From Research to Commercialization - | (ISC2003)Proceedings of Sensors Conference 2003, International Sensor Conference 2003, Nov.14-15, 2003, Korea Institute of Science and Technology, The Korean Sensors Society, Vol.14, No.1, pp.15-16 (2003.11) |
12 | INTERNATIONAL CONFERENCE | T. Toriyama, K. Hashimoto, J. Ogawa and S. Sugiyama | Micro Reciprocating Engine Based on SOI Structure | (PowerMEMS 2003) 3rd International Workshop on Micro and Nano Technology for Power Generation and Energy Conversion Applications, Dec.4-5, 2003, Makuhari, Global Emerging Technology Institute(GETI) and Institute of Electrical Engineers of Japan (2003.12) |
13 | INTERNATIONAL CONFERENCE | S. Khumpuang, R. Maeda and S. Sugiyama | Microneedle Array and Insertion Guide Array for Safe Use of Biomedical Applications | SPIE Int'l Symposium on Microelectronics, MEMS, and Nanotechnology 2003, Dec. 10-12, 2003, Perth, Australia (2003.12) |
14 | INTERNATIONAL
CONFERENCE (Poster) |
S.Hasebe, J.Ogawa, M.Shiozaki, T.Toriyama, S.Sugiyama, H.Ueno and K.Itoigawa | Polymer Based Smart Flexible Thermopile for Power Generation | (MEMS 2004) Technical Digest, 17th IEEE Int'l Conference on Micro Electro Mechanical Systems, Jan.25-29, 2004, Maastricht, The Netherlands, pp.689-692 (2004.1) |
15 | INTERNATIONAL CONFERENCE | Dzung Viet Dao, Machiko Koshigoe, Van Thanh Dau, Toshiyuki Toriyama and Susumu Sugiyama | Sensitivity Analysis for an Ultra Small Accelerometer Using Nanowire Piezoresistor | IEEE NDSI 2004, Conference digests of the IEEE International Conference on Nanoscale Devices and System Integration, Miami, Florida, Feb. 15-19, 2004, p.166 (2004.2) |
16 | INTERNATIONAL CONFERENCE | (to be presented) | ||
1 | DOMESTIC CONFERENCE | A.T. Nguyen, D.V. Dao, V.T. Dau, M. Takahashi, T. Toriyama, J.C. Wells and S. Sugiyama | Measurement of Loads Acting on a Near-Wall Particle in Turbulent Water Flow by Using a 6-DOF MEMS-Based Sensor | Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan, pp.139-144 (2003.7) |
2 | DOMESTIC CONFERENCE | K. Nagai, R. Fujimoto, S. Miyawaki, N. Oshie, S. Toda and S. Sugiyama | Consideration on the Properties of a Small Position Sensor with Low Temperature Drift | Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan, pp.205-208 (2003.7) |
3 | DOMESTIC CONFERENCE | Y. Yamada, Y. Kinoshita, D.V. Dzung, T. Toriyama, S. Sugiyama and M. Harada | Design of a Three Axis Force Sensor Based on SOI-MICS | Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan, pp.253-258 (2003.7) |
4 | DOMESTIC CONFERENCE | Naoki Miyano, Hiroshi Iwasa, Kei Ameyama and Susumu Sugiyama | Micro-Structures of TiC/Ti5Si3 Composite Fabricated by LIGA-MA Process | Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan, pp.387-390 (2003.7) |
5 | DOMESTIC CONFERENCE | J.Ogawa, S.Hasebe, T.Toriyama, S.Sugiyama, H.Ueno and K.Itoigawa | Fabrication of Flexible Thermopile for Power Generation | Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan, pp.347-351 (2003.7) |
6 | DOMESTIC CONFERENCE | G.Kawaguchi, N.Samoto, H.Tosa and S.Sugiyama | Investigation of X-ray Mask Patterns for Fabrication of Micro Needle Array Using SR Lithography | Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan, pp.397-400 (2003.7) |
7 | DOMESTIC CONFERENCE | Susumu Sugiyama | MEMSが拓くメカトロニクスの将来 | 第8回知能メカトロニクスワークショップ講演論文集、滋賀、精密工学会、pp.1-6 (2003.8) |
8 | DOMESTIC CONFERENCE | G.Kawaguchi, S.Khumpuang and S.Sugiyama | Optimization of Actual Microneedle Tip-Size Resulted from Tilt-Angle and Designed Patterns of X-ray Mask | 第8回知能メカトロニクスワークショップ講演論文集、滋賀、精密工学会、pp.57-61 (2003.8) |
9 | DOMESTIC CONFERENCE | A.T. Nguyen, D.V. Dao, T. Toriyama, J.C. Wells and S. Sugiyama | Measurement of Loads Acting on a Near-Wall Particle in Turbulent Water Flow by Using a 6-DOF MEMS-Based Sensor | 第8回知能メカトロニクスワークショップ講演論文集、滋賀、精密工学会、pp.67-72 (2003.8) |
10 | DOMESTIC CONFERENCE | Naoki Miyano and Susumu Sugiyama | Fabrication and Application of 3D Micro/Nano Structures by SR Lithography | The17th Annual Autumn Meeting, Japanese Society for Medical and Biological Engineering (JSMBE), Keihanna Plaza, Oct.20-22, 2003 (2003.10) |
11 | DOMESTIC CONFERENCE | (to be presented) | ||
1 | OTHER (SYMPOSIUM,etc) |
Susumu Sugiyama | LIGAプロセスの産業への応用事例 | 平成15年度第3回ナノテク研究会、(社)滋賀工業会、pp.1-12 (2003.7) |
2 | OTHER (SYMPOSIUM,etc) |
Susumu Sugiyama | 放射光リソグラフィーによる3次元マイクロ・ナノ構造の製作 | 化学工業、化学工業社、第54巻 第11号、pp.51-55 (2003.11) |
3 | OTHER (SYMPOSIUM,etc) |
Susumu Sugiyama | LIGAによる3次元超微細構造体の加工 | 第47回放射光産業利用技術懇談会 放射光国際シンポジウム−21世紀の放射光源とその利用−、放射光産業利用技術懇談会主催 (2003.11) |
4 | OTHER (SYMPOSIUM,etc) |
Susumu Sugiyama | LIGAプロセスによる3次元微細加工 | 塑性と加工−マイクロ・ナノ加工小特集号−(日本塑性加工学会誌)、第44巻 第514号、pp.9-12 (2003.11) |
5 | OTHER (SYMPOSIUM,etc) |
Susumu Sugiyama | 放射光によるナノ/マイクロマシンの作製 | 応用物理学会結晶工学分科会年末講演会テキスト、pp.33-37 (2003.12) |
6 | OTHER (SYMPOSIUM,etc) |
Susumu Sugiyama | 放射光による微細加工 (in Japanese) |
High Polymers, Japan,The Society of Polymer Science, Japan, Vol.53, Feb., pp.70-73 (2004.2) |
7 | OTHER (SYMPOSIUM,etc) |
(to be presented) | ||
8 | OTHER (SYMPOSIUM,etc) |