PUBLISHED PAPERS & PRESENTATIONS BY SUGIYAMA LAB.
<Apr. 2002 - Mar. 2003>
（last modified : Aug. 30, 2003）
| No. | PRESEN- TATION |
AUTHOR ／ COAUTHOR | TITLE | JOURNAL & PUBLISHER ／ CONFERENCE NAME |
| 1 | PAPER | Toshinori Unno, Toshiyuki Toriyama, Md. Moinul Islam Bhuiyan, Yoshihiko Yokoyama and Susumu Sugiyama | Micro Connector for High Packaging Density Fabricated by Using UV Thick Photoresist | The Transactions of The Institute of Electrical Engineers of Japan, The Inst. of Electrical Engineers of Japan, Vol. 122-E, No.5, May 2002, pp.249-255 (2002.5) |
| 2 | PAPER | Masakazu Yajima, Toshiyuki Toriyama and Susumu Sugiyama | Self-standing Polysilicon-metal Thermopile for Micro Power Generator | The Transactions of The Institute of Electrical Engineers of Japan, The Inst. of Electrical Engineers of Japan, Vol. 122-E, No.5, May 2002, pp.256-260 (2002.5) |
| 3 | PAPER | Dzung Viet Dao, Toshiyuki Toriyama, John Wells and Susumu Sugiyama | Design and Fabrication of Six-Degree of Freedom Piezoresistive Turbulent Water Flow Sensor | Journal of the Korean Sensors Society, Vol.11, No.4, July 2002, The Korean Sensors Society, pp.191-199 (2002.7) |
| 4 | PAPER | Toshiyuki Toriyama and Susumu Sugiyama | Analysis of Piezoresistance in p-Type Silicon for Mechanical Sensors | Journal of Microelectromechanical Systems, Vol. 11, No. 5, Oct. 2002, IEEE, pp.598-604 (2002.10) |
| 5 | PAPER | Toshiyuki Toriyama, Yasutada Tanimoto and Susumu Sugiyama | Single Crystal Silicon Nano-Wire Piezoresistors for Mechanical Sensors | Journal of Microelectromechanical Systems, Vol. 11, No. 5, Oct. 2002, IEEE, pp.605-611 (2002.10) |
| 6 | PAPER | Toshiyuki Toriyama and Susumu Sugiyama | Analysis of Piezoresistance in n-Type β-SiC for High-Temperature Mechanical Sensors | Applied Physics Letters, Vol. 81, No.15, Oct. 2002, American Institute of Physics, pp.2797-2799 (2002.10) |
| 7 | PAPER | N. Nishi, T. Katoh, H. Ueno and S. Sugiyama | Study on Three-dimensional Micromachining Using Synchrotron Radiation Etching | Microsystem Technologies, Vol. 9, No. 1-2, pp.1-4, Springer (2002.11) |
| 8 | PAPER | Toshiyuki Toriyama, Daisuke Funai and Susumu Sugiyama | Piezoresistance Measurement on Single Crystal Silicon Nanowires | Journal of Applied Physics, Vol.93, No.1, Jan. 2003, American Institute of Physics, pp.561-565 (2003.1) |
| 1 | INTERNATIONAL CONFERENCE | D.V. Dao, J.C. Wells, T. Toriyama and S. Sugiyama | Development of Six-Degree-of Freedom Micro-Force Sensor for Applications in Geophysics | IEEE Sensors 2002, The First IEEE Int'l Conference on Sensors, June 12-14, 2002, Orlando, Florida, USA (2002.6) |
| 2 | INTERNATIONAL CONFERENCE | T. Toriyama, D. Funai and S. Sugiyama | Piezoresistance in Single Crystal Silicon Nano Wire Bridges | MEMS 2002 Workshop Digest, Pacific Rim Workshop on Transducers and Micro/Nano Technologies, July22-24, 2003, Xiamen, China, Chinese Soc. Of Micro-Nano Technology / Xiamen Univ. / Pen-Tung Sah Foundation, Xiamen Univ. Press, pp.95-98 (2002.7) |
| 3 | INTERNATIONAL CONFERENCE | Dzung Viet Dao, Toshiyuki Toriyama, John C. Wells and Susumu Sugiyama | Development and Evaluation of Multi-Axis Micro Force Moment Sensor for Application in Geophysics | MEMS 2002 Workshop Digest, Pacific Rim Workshop on Transducers and Micro/Nano Technologies, July22-24, 2002, Xiamen, China, Chinese Soc. Of Micro-Nano Technology / Xiamen Univ. / Pen-Tung Sah Foundation, Xiamen Univ. Press, pp.35-38 (2002.7) |
| 4 | INTERNATIONAL CONFERENCE | Naoki Miyano, Kazunori Tagaya, Kazunori Kawase, Kei Ameyama and Susumu Sugiyama | Fabrication of Alloy and Ceramic Microstructures by LIGA-MA-SPS Process | MEMS 2002 Workshop Digest, Pacific Rim Workshop on Transducers and Micro/Nano Technologies, July22-24, 2004, Xiamen, China, Chinese Soc. Of Micro-Nano Technology / Xiamen Univ. / Pen-Tung Sah Foundation, Xiamen Univ. Press, pp.167-170 (2002.7) |
| 5 | INTERNATIONAL CONFERENCE | Naoki Miyano, Hiroshi Iwasa, Michito Matsumoto, Fumiki Kato, Kei Ameyama and Susumu Sugiyama | Fabrication of TiNi Shape Memory Alloy Micro-structures and Ceramic Micro-mold by LIGA-MA-SPS Process | IEEE MHS2002, Proceedings of the 2002 International Symposium on Micromechatronics and Human Science, Oct. 20-23, 2002, Nagoya, pp.53-59 (2002.10) |
| 6 | INTERNATIONAL CONFERENCE | Dzung V. Dao, Anh T. Nguyen, Chuoung V. Nguyen, Toshiyuki Toriyama, John C. Wells and Susumu Sugiyama | A Multi-Axis Force-Moment Micro Sensor for Application in Fluid Mechanics | IEEE MHS2002, Proceedings of the 2002 International Symposium on Micromechatronics and Human Science, Oct. 20-23, 2002, Nagoya, pp.187-190 (2002.10) |
| 7 | INTERNATIONAL CONFERENCE | T. Toriyama and S. Sugiyama | 100nm Square Single Crystal Silicon Shear Strain Gauge | IEEE MHS2002, Proceedings of the 2002 International Symposium on Micromechatronics and Human Science, Oct. 20-23, 2002, Nagoya, pp.223-226 (2002.10) |
| 8 | INTERNATIONAL CONFERENCE | Akira Ishii, Susumu Sugiyama, Jun-ichi Sakai, Shinichi Hirai and Toshihiko Ochi | Constant-Magnification Focusing Using a Varifocal Mirror and Its Application to 3-D Imaging | Proceedings of SPIE, Vol. 4902, Soc. Of Photo-Optical Instrumentation Engineers (Optomechatronic Systems III, Nov.12-14, 2002, Stuttgart, Germany), pp.238-245 (2002.11) |
| 9 | INTERNATIONAL CONFERENCE | Susumu Sugiyama and Tshiyuki Toriyama | Design of a Micro Reciprocating Engine for Power Generation | (Power MEMS 2002) International Workshop on Power MEMS 2002 Technical Digest, Tsukuba, Japan, Nov.12-13, 2002, Global Emerging Technology Institute et al., pp.56-59 (2002.11) |
| 10 | INTERNATIONAL CONFERENCE | Susumu Sugiyama and Tshiyuki Toriyama | Surfacemicromachined Polysilicon-Metal Thermopile for Power Generation | (Power MEMS 2002) International Workshop on Power MEMS 2002 Technical Digest, Tsukuba, Japan, Nov.12-13, 2002, Global Emerging Technology Institute et al., pp.106-109 (2002.11) |
| 11 | INTERNATIONAL CONFERENCE | Susumu Sugiyama | Synchrotron Radiation Micro Lithography and Etching (SMILE) for MEMS Fabrication | Proceedings of ISSS-SPIE 2002, International Conference on Smart Materials Structures and Systems, Dec. 12-14, 2002, Indian Instite of Science, Bangalore, India, pp.766-777 (2002.12) |
| 12 | INTERNATIONAL CONFERENCE | Susumu Sugiyama | Micro Electro Mechanical Systems (MEMS) -From Research to Industry- | The 7th National Congress on Mechanics, Hanoi, Dec. 18-21, 2002, Vietnam Association of Mechanics et al. (2002.12) |
| 13 | INTERNATIONAL CONFERENCE | Dzung Viet Dao, Toshiyuki Toriyama, John Wells and Susumu Sugiyama | MEMS-Based Micro Multi-Axis Force-Moment Sensor Design, Fabrication and Application | The 7th National Congress on Mechanics, Hanoi, Dec. 18-21, 2002, Vietnam Association of Mechanics et al. (2002.12) |
| 14 | INTERNATIONAL CONFERENCE | A.T.Nguyen, J.C.Wells, Y.Yamamoto, D.V.Dao, T.Toriyama and S.Sugiyama | Simulation of Turbulent Flow Around 6-DOF Micro Sensor and Experimental Results | The 7th National Congress on Mechanics, Hanoi, Dec. 18-21, 2002, Vietnam Association of Mechanics et al. (2002.12) |
| 15 | INTERNATIONAL CONFERENCE | Toshiyuki Toriyama and Susumu Sugiyama | Single Crystal Silicon Four-Terminal Nano-Wire Shear Stress Gauge for Nano Mechanical Sensors | (MEMS 2003) IEEE Proceedings of The 16th Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Jan. 19-23, 2003, IEEE, pp.48-51 (2003.1) |
| 1 | DOMESTIC CONFERENCE | T. Toriyama, D. Funai and S. Sugiyama | Piezoresistance Measurement in Single Crystal Silicon Nano Wires | Proceedings of the 19th Sensor Symposium on Sensors, Micromachines, and Applied Systems, May 30-31, 2002, Kyoto, Japan, The Inst. of Electrical Engineers of Japan, pp.47-51 (2002.5) |
| 2 | DOMESTIC CONFERENCE | Naoki Miyano, Kazunori Tagaya, Kazunori Kawase, Kei Ameyama and Susumu Sugiyama | Fabrication of Micro Structures Using LIGA-MA-SPS Process | Proceedings of the 19th Sensor Symposium on Sensors, Micromachines, and Applied Systems, May 30-31, 2002, Kyoto, Japan, The Inst. of Electrical Engineers of Japan, pp.321-326 (2002.5) |
| 3 | DOMESTIC CONFERENCE | Satoshi Nakano, Keiji Hashimoto, Toshiyuki Toriyama and Susumu Sugiyama | Design of a Reciprocating Engine for Micro Power Generator | Proceedings of the 19th Sensor Symposium on Sensors, Micromachines, and Applied Systems, May 30-31, 2002, Kyoto, Japan, The Inst. of Electrical Engineers of Japan, pp.501-506 (2002.5) |
| 4 | DOMESTIC CONFERENCE | 宮野公樹、多賀谷和範、川瀬和典、飴山 惠、杉山 進 | LIGA-MA-SPS 粉末焼結法による微細構造体の製作 | 粉体粉末冶金協会 平成14年度春季大会、早稲田大学、（社）粉体粉末冶金協会 (2002.5) |
| 5 | DOMESTIC CONFERENCE | 宮野公樹、岩佐浩史、加藤史樹、飴山 惠、杉山 進 | LIGA-MA-SPS 粉末焼結法による微細構造体の製作 | 日本金属学会秋季大会、大阪大学、日本金属学会 (2002.11) |
| 6 | DOMESTIC CONFERENCE | Naoki Miyano | 放射光を活用した三次元微細加工技術（SMILE） | 文部科学省ナノテクノロジー総合支援プロジェクト「放射光グループシンポジウム－放射光が拓くナノテクノロジーの世界－」虎ノ門パストラル、東京 (2002.12) |
| 7 | DOMESTIC CONFERENCE | 土佐秀樹、川口 岳、佐本典彦、古田晋士、吉村千里、青木彦治、杉山 進 | マスクパターン最適化によるシンクロトロン放射光を用いたマイクロニードルアレイの作製 | 電気学会研究会資料、電気学会マイクロマシン・センサシステム研究会、MSS-03-3、pp.11-16 (2003.2) |
| 8 | DOMESTIC CONFERENCE | 磯野吉正、多田順一、渡辺稔之、海野敏典、杉山 進、鳥山寿之 | マイクロコネクター設計に向けたUV-LIGA Ni の高温引張り／クリープ試験の試み | 電気学会研究会資料、電気学会マイクロマシン・センサシステム研究会、MSS-03-8、pp.41-46 (2003.2) |
| 9 | DOMESTIC CONFERENCE | D.V.Dzung、鳥山寿之、杉山 進、山田行利、木下好之、原田宗生 | SOI-MICSのデザインルールに基づく３軸フォースセンサの設計 | 電気学会研究会資料、電気学会マイクロマシン・センサシステム研究会、MSS-03-4、pp.17-22 (2003.2) |
| 1 | OTHER (SYMPOSIUM,etc) |
Susumu Sugiyama | 微細構造製造プロセス技術 | 「電気学会技術報告」第878号（E部門）、pp.33-35、電気学会 (2002.4) |
| 2 | OTHER (SYMPOSIUM,etc) |
Susumu Sugiyama | シンクロトロン放射（SR）光リソグラフィーによる三次元微細構造の製作と応用 | 「化学とマイクロ・ナノシステム」第1巻第1号、化学とマイクロシステム研究会 (2002.6) |
| 3 | OTHER (SYMPOSIUM,etc) |
Susumu Sugiyama | ハイアスペクト比X線リソグラフィ（LIGA）の現状 | 電気学会講習会「マイクロプロセスとそのプロセス技術の動向」、電気学会、東京 (2002.7) |
| 4 | OTHER (SYMPOSIUM,etc) |
Susumu Sugiyama | シンクロトロン放射光リソグラフィを用いたマイクロファブリケーション技術 | 第78回ラドテック研究会講演会、大阪、ラドテック研究会 (2002.7) |
| 5 | OTHER (SYMPOSIUM,etc) |
Susumu Sugiyama | 放射光リソグラフィーによる三次元マイクロ・ナノ構造の製作とその応用 | 平成14年度第1回放射光産業利用研究会、講演Ⅲ、広島大学、（財）中国技術振興センター (2002.9) |
| 6 | OTHER (SYMPOSIUM,etc) |
Susumu Sugiyama | 放射光リソグラフィーによる三次元マイクロ・ナノ構造の製作とその応用 | ナノプレシジョンエリア極微細加工技術研究会、岡山、岡山県産業振興財団 (2002.12) |
| 7 | OTHER (SYMPOSIUM,etc) |
Susumu Sugiyama | マイクロ・ナノマシン製造インフラストラクチャー（ファンダリー・ネットワーク構築に向けて） | 「計測と制御」第42巻第1号、（社）計測自動制御学会、pp.12-17 (2003.1) |
| 8 | OTHER (Contribution) |
Susumu Sugiyama and other 37 authors | LIGA | 「加工技術データファイル 基礎編 特殊加工」9.2章、（財）機械振興協会技術研究所、pp.175-179 (2003.3) |