College of Science and Engineering Department of Micro System Technology
Laboratories
Professors
Micro Mechanical Science Laboratory
Taeko ANDO
Local Fracture Control Laboratory
Akira UENO
Integrated MEMS Sensor Laboratory
Masafumi KIMATA
Micro Nano Mechatronics Laboratory
Satoshi KONISHI
Kenichi MORIMOTO
MEMS Info-communications Laboratory
Kenichiro SUZUKI
Micro Design and Engineering Laboratory
Toshiyuki TORIYAMA
Naoki MATSUZUKA
Intelligence Micro System Laboratory
Takaya MIYANO