Nano Integrated Devices Lab.(MiNIDeL) or previously
Microsystem Lab.(MSL) has been established since 1995
by Prof. Sugiyama Susumu, the director.
The research of integrated sensors, microactuators,
microsystems, LIGA technology and micro packaging
have been being developed in MiNIDeL. We are aiming
on design and fabrication technology of MEMS devices
(MEMS is Micro-ElectroMechanical Systems that has
advantages in scaling, performance and cost compared
to technology of conventional devices) and materials
especially for LIGA process.
researches are micro/nano fabrication of transducers.
Some of Mechanical, Thermal, Electrical, Physical,
and Bio-medical techniques have been employed here
for designs and fabrications of microfluidic-, microoptics-devices,
sensors and actuators. The details can be found on
section or contact
to MiNIDeL staffs.
for High Aspect Ratio MicroStructure(HARMS) is also
one of our main projects. The SR center in our university,
Ritsumeikan provides a synchrotron radiation(SR) X-ray
source, AURORA. The PCT (Plain pattern to Cross section
Transfer) technique is our novel deep X-ray lithography
technology. X-ray resist materials for LIGA process
are investigated in our laboratory.