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||| R E S E A R C H |||

Nano-machining Process and Device Technology	Characteristics of Polycrystalline Si Nano Wire Piezoresistors Sub-MicronLIGA Process
Micromechanical Sensor Technology	Development of Silicon Piezoresistive Pressure Sensor for High Pressure Measurement Utilizing Three-axis Stress Components Micro Gyroscope Micro Multi-Axis Force-Moment Sensor
Surface Micromachined Sensors	Condenser Microphone Thermopile for Micro Power Generator
Piezoelecric Micropumps and Microvalves	マイクロバルブの研究開発 [in Japanese]
Micropackaging	Micro Connector
SMILE (Synchrotron Radiation Micro Lithography and Etching)	X線を用いたリソグラフィー [in Japanese] Fabrication of High Aspect Ratio Electrostatic Micro Actuators Using LIGA Process Three-dimensional Micromachining of PTFE Using Synchrotron Radiation Light Development of Thick Film Magnetic Cores for High Frequency Using LIGA Process
Sensors for the Human Information	指先フォースセンサの開発 [in Japanese]
Micro Robot	The works for the International Micro Robot Contest [in Japanese] International Micro Robot Maze Contest
MICS (Micromachine Integrated Chip Service)	アナログIC、サーフェスマイクロマシニング応用デバイス、LIGAプロセス応用デバイスの協同試作サービスのインフラ整備と普及 [in Japanese]