F A C I L I T I E S

( Engineering Experiment Labo. 2 )

CLEAN ROOM
MICRO PROCESS LAB.
EQUIPMENT MODEL MANUFACTURER
DIFFUSION FURNACES & ANNEAL FURNACES 　 RIKEN
PLASMA CVD MACHINE ＰＤ２４００ SAMCO
RIE MACHINE ＲＩＥ－１０Ｎ SAMCO
SPATTERING MACHINE 　 ULVAC
ＥＢ EVAPORATOR 　 ULVAC
VACUUM EVAPORATOR 　 ULVAC
WIRE BONDER ４１２４(Ｍ) Kulicke & Soffa (Japan) LTD
WET ETCHING & CLEANING STATION 　 YAMATO

( Engineering Experiment Labo. 2 )

CLEAN ROOM
ＥＢ LITHO. LAB. & PHOTO LITHO. LAB.
EQUIPMENT MODEL MANUFACTURER
ＥＢ LITHOGRAPHY SYSTEM ＪＢＸ－５０００ＬＳ JEOL
BOTH SIDE ALIGNER ＰＥＭ－８００ UNION
MASK ALIGNER 　 KYOWA
PHOTO FORMING MACHINE 　 DENKEN

( SR Center , Engineering Experiment Labo. 2 )

FACILITIES OF LIGA PROCESS
EQUIPMENT MODEL MANUFACTURER
SYNCHROTRON RADIATION LIGHT SOURCE ＡＵＲＯＲＡ SHI
EXPOSURE CHAMBER FOR X-RAY LITHOGRAPHY 　 SHI
Ｎｉ ELECTROFORMING BATH 　 NIKKO METAL PLATING, etc.
RESIST WORK STATION 　 　

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