Taeko Ando and Toshiyuki Toriyama
Description of New Piezoresistance Tensor Equation for a Cubic Single Crystal and Its Application to Multiaxial Stress
Sensors and Materials, vol. 30, no. 9, pp. 2101-2124 (2018) 10.18494/SAM.2018.1960
Taeko Ando and Toshiyuki Toriyama
Role of preferential crystallographic orientation in piezoresistance anisotropy for cubic polycrystalline aggregates
Sensors and Materials, vol. 30, no. 9, pp. 2125-2142 (2018) 10.18494/SAM.2018.1959
2016年
Taeko Ando, Mitsuhiro Shikida, and Kazuo Sato
Effect of Temperature and Humidity on Degradation of Single-Crystal Silicon Microbeam in MEMS Resonator
Sensors and Materials, vol. 28, no. 2, pp. 113-120 (2016) 10.18494/SAM.2016.1161
Yasuyuki Koide, Daisuke Teramoto, Satoshi Konishi, and Taeko Ando
Fabrication of Convex Si Microstructures for Hot Embossing of Microfluidic Channels with 45° Mirror
Japanese Journal of Applied Physics, 53, 6, 06JM13, (2014)
2013年
T. A. Phan, H. Oguchi, M. Hara, M. Shikida, H. Hida, T. Ando, K. Sato, and H. Kuwano
Fe-B-Nd-Nb metallic glass thin films for microelectromechanical systems
Applied Physics Letters, 103, 181901 (2013)
2008年以前
S. Nakao, T. Ando, M. Shikida, and K. Sato
Effect of temperature on fracture toughness in a single-crystal-silicon film and transition in its fracture mode
Journal of Micromechanics and Microengineering, vol. 18, no. 1, article numver: 015026 (2008)
X. Li, T. Kasai, S. Nakao, T. Ando, M. Shikida, and K. Sato
Influence of sub-micrometer notches on the fracture of single crystal silicon thin films
Fatigue & Fracture of Engineering Materials & Structures, vol.30, no.12, pp.1172-1181 (2007)
X. Li, G. Ding, T. Ando, M. Shikida, and K. Sato
Micromechanical characterization of electroplated permalloy films for MEMS
Microsystem Technologies, vol. 14, no. 2, pp.131-134 (2007)
S. Nakao, T. Ando, M. Shikida, and K. Sato
Mechanical properties of a micron-sized SCS film in a high-temperature environment
Journal of Micromechanics and Microengineering, vol. 16, no. 4, pp.715-720 (2006)
T. Tsuchiya, M. Hirata, N. Chiba, R. Udo, Y. Yoshitomi, T. Ando, K. Sato, K. Takashima, Y. Higo, Y. Saotome, H. Ogawa, and K. Ozaki
Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films
Journal of Microelectromechanical Systems, vol. 14 -5, pp. 1178-1186 (2005)
T. Ando, X. Li, S. Nakao, T. Kasai, M. Shikida, and K. Sato
Fracture toughness measurement of thin-film silicon
Fatigue & Fracture of Engineering Materials & Structures, vol.28, no.8, pp.687-694 (2005)
T. Ando, X. Li, S. Nakao, T. Kasai, M. Shikida, and K. Sato
Anisotropy of Fracture Strength and Fracture Toughness of Micro-sized Single-crystal Silicon
The Transactions of The Institute of Electrical Engineers of Japan, vol. 125-E, no. 7, pp. 307-312 (2005)
X. Li, T. Kasai, S. Nakao, H. Tanaka, T. Ando, M. Shikida, and K. Sato
Measurement for fracture toughness of single crystal silicon film with tensile test
Sensors and Actuators A: Physical, vol. 119, no. 1, pp. 229-235 (2005)
X. Li, T. Kasai, S. Nakao, T. Ando, M. Shikida, K. Sato, and H. Tanaka
Anisotropy in fracture of single crystal silicon film characterized under uniaxial tensile condition
Sensors and Actuators A: Physical, vol. 117, no. 1, pp. 143-150 (2005)
M. Shikida, M. Ando, Y. Ishihara, T. Ando, K. Sato, and K. Asaumi
Non-photolithographic pattern transfer for fabricating pen-shaped microneedle structures
Journal of Micromechanics and Microengineering, vol. 14, no. 11, pp.1462-1467 (2004)
M. Shikida, M. Odagaki, N. Todoroki, M. Ando, Y. Ishihara, T. Ando, and K. Sato
Non-photolithographic pattern transfer for fabricating arrayed three-dimensional microstructures by chemical anisotropic etching
Sensors and Actuators A: Physical, vol. 116, no. 2, pp. 264-271 (2004)
T. Ando, M. Shikida, K. Sato
Tensile-mode fatigue testing of silicon films as structural materials for MEMS
Sensors and Actuators A: Physical, vol. 93, no. 1, pp. 70-75 (2001)
T. Yoshioka, T. Ando, M. Shikida, and K. Sato
Tensile testing of SiO2 and Si3N4 films carried out on a silicon chip
Sensors and Actuators A: Physical, vol. 82, no. 1-3, pp. 291-296 (2001)
K. Sato, T. Yoshioka, T. Ando, M. Shikida, and T. Kawabata
Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip
Sensors and Actuators A: Physical, vol. 70, no. 1-2, pp. 148-152 (1998)
国際会議発表(2009年以降)
2016年
T. Ando and T. Toriyama
Piezoresistive Rosette Gauge Taking into Account of Silicon Cubic Crystal Anisotropy
Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT2016), (Kanazawa, Jun. 26-29, 2016)
T. Ando, K. Ueno, and M. Nakajima
Compliant MEMS Structure for Observation of Fixed Point under Tensile Deformation
The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), (Matsushima, Apr. 17-20, 2016)
2015年
S. Sugiyama, T. Ando, S. Amaya
Investigation of Material Mechanical Properties Used for Polymer MEMS
The 5th International Workshop on Nanotechnology and Application (IWNA 2015), (Vung Tau, Vietnam, Nov. 11-14, 2015)
K. Ueno and T. Ando
Effect of Temperature and Loading Rate on Plastic Deformation of Single Crystal Si
28th International Microprocesses and Nanotechnology Conference (MNC2015), 12P-7-102, (Toyama, Nov. 10-13, 2015)
2014年
S. Shibata, S. Amaya, S. Sugiyama, and T. Ando
Fatigue Phenomenon of PMMA Under Cyclic Stress Using Electrostatic Com-Drive Actuator
27th International Microprocesses and Nanotechnology Conference (MNC2014), 6C-5-3, (Fukuoka, Nov. 4-7, 2014)
K.Tani and T. Ando
Fabrication of MEMS Chamber for SEM Observation Under Controlled Temperature Condition
27th International Microprocesses and Nanotechnology Conference (MNC2014), 6P-7-94, (Fukuoka, Nov. 4-7, 2014)
S. Sugiyama, S. Shibata, S. Amaya, and T. Ando
Application of Polymer MEMS to Material Fatigue Testing
The 2nd International Conference on Advanced Materials and Nanotechnology, (Hanoi, Oct. 29-Nov. 1, 2014)
S. Shibata, S. Amaya, S. Sugiyama, and T. Ando
Fatigue Testing of PMMA Using Polymer MEMS Actuator Fabricated by Hot Embossing
7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014), 14-1, (Daegu, Jun. 29-Jul. 2, 2014)
2013年
Yasuyuki Koide, Daisuke Teramoto, Satoshi Konishi, and Taeko Ando
Fabrication of convex Si microstructures with 45° mirror plane for application of microfluidic channels
MNC 2013, 26th International Microprocesses and Nanotechnology Conference, 8P-11-110, (2013.11.5-8, 札幌)
T. A. Phan, H. Oguchi, M. Hara, M. Shikida, H. Hida, T. Ando, K. Sato, and H. Kuwano
A new metallic glass Fe-B-Nd-Nb thin film material for micro sensors and actuators: fabrication and characterization
Tech. Dig. of The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’13) pp. 1040-1043, (Barcelona, Jun. 16-20, 2013)
T. Shirata, T. Sato, and T. Ando
Dependence of mechanical on position in silicon ingot by evaluating B and Ge codoped silicon
Tech. Dig. of The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’13) pp. 1055-1058, (Barcelona, Jun. 16-20, 2013)
2011年
T. Ando, T. Takumi, and Kazuo Sato
Fracture Toughness of Si Thin Film at Very Low Temperatures by Tensile Test
Proc. of IEEE MEMS 2011, pp.436-439, (Cancun, Mexico, Jan. 24-27, 2011)
S. Kamiya, T. Tsuchiya, T. Ikehara, K. Sato, T. Ando, T. Namazu, and K. Takashima
Cross comparison of fatigue lifetime testing on silicon thin film specimens
Proc. of IEEE MEMS 2011, pp.436-439, (Cancun, Mexico, Jan. 24-27, 2011)
2009年
T. Naito, A. Yatsuhashi, N. Kaji, T. Ando, K. Sato, H. Moriya, H. Kitano, Y. Okamoto, M. Tokeshi, and Y. Baba
On-chip real-time PCR for genetic Tug-of-War (g-TOW) experiment
Proceedings of MicroTAS 2009 conference, pp. 627-629, (Jeju, Korea, Nov. 1-5, 2009)
T. Ando, T. Takumi, and Kazuo Sato
Degradation of mechanical strength at Si/SiO2 interface on SOI wafers under cyclic loading
Proc. of IEEE MEMS 2009, pp.665-669, (Sorento, Jan. 25-29, 2009)