Taeko Ando, Mitsuhiro Shikida, and Kazuo Sato
Effect of Temperature and Humidity on Degradation of Single-Crystal Silicon Microbeam in MEMS Resonator
Sensors and Materials, vol. 28, no. 2, pp. 113-120 (2016) 10.18494/SAM.2016.1161
Yasuyuki Koide, Daisuke Teramoto, Satoshi Konishi, and Taeko Ando
Fabrication of Convex Si Microstructures for Hot Embossing of Microfluidic Channels with 45° Mirror
Japanese Journal of Applied Physics, 53, 6, 06JM13, (2014)
2013
T. A. Phan, H. Oguchi, M. Hara, M. Shikida, H. Hida, T. Ando, K. Sato, and H. Kuwano
Fe-B-Nd-Nb metallic glass thin films for microelectromechanical systems
Applied Physics Letters, 103, 181901 (2013)
Before 2008
S. Nakao, T. Ando, M. Shikida, and K. Sato
Effect of temperature on fracture toughness in a single-crystal-silicon film and transition in its fracture mode
Journal of Micromechanics and Microengineering, vol. 18, no. 1, article numver: 015026 (2008)
X. Li, T. Kasai, S. Nakao, T. Ando, M. Shikida, and K. Sato
Influence of sub-micrometer notches on the fracture of single crystal silicon thin films
Fatigue & Fracture of Engineering Materials & Structures, vol.30, no.12, pp.1172-1181 (2007)
X. Li, G. Ding, T. Ando, M. Shikida, and K. Sato
Micromechanical characterization of electroplated permalloy films for MEMS
Microsystem Technologies, vol. 14, no. 2, pp.131-134 (2007)
S. Nakao, T. Ando, M. Shikida, and K. Sato
Mechanical properties of a micron-sized SCS film in a high-temperature environment
Journal of Micromechanics and Microengineering, vol. 16, no. 4, pp.715-720 (2006)
T. Tsuchiya, M. Hirata, N. Chiba, R. Udo, Y. Yoshitomi, T. Ando, K. Sato, K. Takashima, Y. Higo, Y. Saotome, H. Ogawa, and K. Ozaki
Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films
Journal of Microelectromechanical Systems, vol. 14 -5, pp. 1178-1186 (2005)
T. Ando, X. Li, S. Nakao, T. Kasai, M. Shikida, and K. Sato
Fracture toughness measurement of thin-film silicon
Fatigue & Fracture of Engineering Materials & Structures, vol.28, no.8, pp.687-694 (2005)
T. Ando, X. Li, S. Nakao, T. Kasai, M. Shikida, and K. Sato
Anisotropy of Fracture Strength and Fracture Toughness of Micro-sized Single-crystal Silicon
The Transactions of The Institute of Electrical Engineers of Japan, vol. 125-E, no. 7, pp. 307-312 (2005)
X. Li, T. Kasai, S. Nakao, H. Tanaka, T. Ando, M. Shikida, and K. Sato
Measurement for fracture toughness of single crystal silicon film with tensile test
Sensors and Actuators A: Physical, vol. 119, no. 1, pp. 229-235 (2005)
X. Li, T. Kasai, S. Nakao, T. Ando, M. Shikida, K. Sato, and H. Tanaka
Anisotropy in fracture of single crystal silicon film characterized under uniaxial tensile condition
Sensors and Actuators A: Physical, vol. 117, no. 1, pp. 143-150 (2005)
M. Shikida, M. Ando, Y. Ishihara, T. Ando, K. Sato, and K. Asaumi
Non-photolithographic pattern transfer for fabricating pen-shaped microneedle structures
Journal of Micromechanics and Microengineering, vol. 14, no. 11, pp.1462-1467 (2004)
M. Shikida, M. Odagaki, N. Todoroki, M. Ando, Y. Ishihara, T. Ando, and K. Sato
Non-photolithographic pattern transfer for fabricating arrayed three-dimensional microstructures by chemical anisotropic etching
Sensors and Actuators A: Physical, vol. 116, no. 2, pp. 264-271 (2004)
T. Ando, M. Shikida, K. Sato
Tensile-mode fatigue testing of silicon films as structural materials for MEMS
Sensors and Actuators A: Physical, vol. 93, no. 1, pp. 70-75 (2001)
T. Yoshioka, T. Ando, M. Shikida, and K. Sato
Tensile testing of SiO2 and Si3N4 films carried out on a silicon chip
Sensors and Actuators A: Physical, vol. 82, no. 1-3, pp. 291-296 (2001)
K. Sato, T. Yoshioka, T. Ando, M. Shikida, and T. Kawabata
Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip
Sensors and Actuators A: Physical, vol. 70, no. 1-2, pp. 148-152 (1998)
