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Research

Characterization of mechanical properties on micro- or nanoscale

  • Tensile test is performed by using silicon chip fabricated by micromachining technique. Our main target material is single crystal silicon, which is one of the most conventional material as MEMS (Micro Electro Mechanical Systems) devices.
tensile testing chip
tensile testing chip
single-srystal-silicon specimen
single-srystal-silicon specimen

Fabrication of complex 3D microstructure

  • by using wet etching for silicon．
  • by using nanoimprint technique for polymer
Si microstructure
Si microstructure
PMMA electrostatic actuator
PMMA electrostatic actuator
Relative resistance changes of fabricated p-type piezoresistors as a function of stress.
Relative resistance changes of fabricated p-type piezoresistors as a function of stress.